Characterization and Applications of A New Tabletop Confocal Micro X-Ray Fluorescence Setup

Lin Xiaoyan,Wang Zhihong,Sun Tianxi,Pan Qiuli,Ding Xunliang
DOI: https://doi.org/10.1016/j.nimb.2007.12.064
2008-01-01
Abstract:A tabletop confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) setup was designed, based on polycapillary X-ray optics and a micro-focus X-ray source. This confocal setup consists of a polycapillary full lens to focus the incident beam and a polycapillary half lens to collect the X-ray fluorescence. The confocal volume was proved to be ellipsoidal. The full-width at half maximum (FWHM) of the confocal volume in three directions were measured with a “knife edge” scan method to obtain the spatial resolution of the confocal setup. The structure of multilayer samples was studied using the depth scan technique.
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