Abstract:In order to fulfill the requirements for high-resolution and high-precision heterodyne interferometric technologies and instruments, the laser interferometry group of HIT has developed some novel techniques for high-resolution and high-precision heterodyne interferometers, such as high accuracy laser frequency stabilization, dynamic sub-nanometer resolution phase interpolation and dynamic nonlinearity measurement. Based on a novel lock point correction method and an asymmetric thermal structure, the frequency stabilized laser achieves a long term stability of 1.2×10-8, and it can be steadily stabilized even in the air flowing up to 1 m/s. In order to achieve dynamic sub-nanometer resolution of laser heterodyne interferometers, a novel phase interpolation method based on digital delay line is proposed. Experimental results show that, the proposed 0.62 nm, phase interpolator built with a 64 multiple PLL and an 8-tap digital delay line achieves a static accuracy better than 0.31nm and a dynamic accuracy better than 0.62 nm over the velocity ranging from -2 m/s to 2 m/s. Meanwhile, an accuracy beam polarization measuring setup is proposed to check and ensure the light’s polarization state of the dual frequency laser head, and a dynamic optical nonlinearity measuring setup is built to measure the optical nonlinearity of the heterodyne system accurately and quickly. Analysis and experimental results show that, the beam polarization measuring setup can achieve an accuracy of 0.03° in ellipticity angles and an accuracy of 0.04° in the non-orthogonality angle respectively, and the optical nonlinearity measuring setup can achieve an accuracy of 0.13°.

Highly Thermal-Stable Heterodyne Interferometer with Minimized Periodic Nonlinearity

A Novel And Simple Heterodyne Interferometer Scheme

Highly Stable Heterodyne Interferometer Without Periodic Nonlinearity

Thermal Drift of Optics in Separated-Beam Heterodyne Interferometers

Balanced Plane-Mirror Heterodyne Interferometer with Subnanometer Periodic Nonlinearity.

Quad-Pass Homodyne Interferometer with Picometer Periodic Nonlinearity and No Beam Walk-Off

An Optical Orthogonal Heterodyne Demodulation Technology for Interferometric Fiber-optic Sensor

High-speed High-Resolution Heterodyne Interferometer Using a Laser with Low Beat Frequency.

A Wavelength-Stabilized and Quasi-Common-Path Heterodyne Grating Interferometer With Sub-Nanometer Precision

Recent Developments in Heterodyne Laser Interferometry at Harbin Institute of Technology

Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer

Nonlinearity of a Double-Path Interferometer Qualified with a Non-Constant Moving Speed.

Spatially Separated Heterodyne Grating Interferometer for Eliminating Periodic Nonlinear Errors

Current Ways and Means for Reduction or Elimination of Periodic Nonlinearity in Heterodyne Interferometer

Thermally compensated common-path differential interferometer with reduced long-term zero-drifts

Sub-nanometer Periodic Nonlinearity Error in Absolute Distance Interferometers.

Micro-vibration measuring technology based on heterodyne interference

Method for Suppressing Periodic Nonlinear Errors Caused by High-Order Optical Crosstalk in High-Subdivision Homodyne Interferometer

Toward A Nonlinearity Model for A Heterodyne Interferometer: Not Based on Double-Frequency Mixing

Real-time Compensation of Nonlinearity in Heterodyne Interferometers Based on Quadrature Demodulation and Extremum Operation

DC-offset-free Homodyne Interferometer and Its Nonlinearity Compensation.