Abstract:Even after the Heydemann correction, residual nonlinear errors, ranging from hundreds of picometers to several nanometers, are still found in heterodyne laser interferometers. This is a crucial factor impeding the realization of picometer level metrology, but its source and mechanism have barely been investigated. To study this problem, a novel nonlinear model based on optical mixing and coupling with ghost reflection is proposed and then verified by experiments. After intense investigation of this new model's influence, results indicate that new additional high-order and negative-order nonlinear harmonics, arising from ghost reflection and its coupling with optical mixing, have only a negligible contribution to the overall nonlinear error. In real applications, any effect on the Lissajous trajectory might be invisible due to the small ghost reflectance. However, even a tiny ghost reflection can significantly worsen the effectiveness of the Heydemann correction, or even make this correction completely ineffective, i.e., compensation makes the error larger rather than smaller. Moreover, the residual nonlinear error after correction is dominated only by ghost reflectance.

Nonlinearity Error in Homodyne Interferometer Caused by Multi-Order Doppler Frequency Shift Ghost Reflections

Nonlinear Errors Resulting From Ghost Reflection And Its Coupling With Optical Mixing In Heterodyne Laser Interferometers

Toward A Nonlinearity Model for A Heterodyne Interferometer: Not Based on Double-Frequency Mixing

Angle error from vibrating in tri-axial interferometric fiber optic gyroscopes and the evaluation with dual-laser Doppler vibrometers

Investigation of Heterodyne Interferometer Technique for Dynamic Angle Measurement: Error Analysis and Performance Evaluation

Nonlinear errors induced by intermodulation in heterodyne laser interferometers.

Compensation of Nonlinear Errors in Laser Heterodyne Interferometers

Influences of Misalignment Errors of Optical Components in an Orthogonal Two-Axis Lloyd's Mirror Interferometer.

Compensation For The Variable Cyclic Error In Homodyne Laser Interferometers

Method for Suppressing Periodic Nonlinear Errors Caused by High-Order Optical Crosstalk in High-Subdivision Homodyne Interferometer

Correction of periodic displacement non-linearities by two-wavelength interferometry

Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer

Periodic Error Characterization in Commercial Heterodyne Interferometer Using an External Cavity Diode Laser Based Fabry-Perot Interferometer

Dynamic nonlinearity errors in laser Doppler vibrometer measurements induced by environmental vibration and error correction

Fine Correction Of Nonlinearity In Homodyne Interferometry

DC-offset-free Homodyne Interferometer and Its Nonlinearity Compensation.

Sub-nanometer Periodic Nonlinearity Error in Absolute Distance Interferometers.

A Real-Time Nonlinear Error Measurement Method with Picometer Accuracy and Free from Target Motion State

Homodyne Laser Interferometer Involving Minimal Quadrature Phase Error to Obtain Subnanometer Nonlinearity.

Method to Reduce First Harmonic Nonlinearity in Laser Heterodyne Interferometry

Offset Errors Caused By The Resonance Asymmetry In The Waveguide-Type Optical Passive Resonator Gyro