C- and O-Band Dual-Polarization Fiber-to-Chip Grating Couplers for Silicon Nitride Photonics
Manuel Kohli,Daniel Chelladurai,Boris Vukovic,David Moor,Dominik Bisang,Killian Keller,Andreas Messner,Tatiana Buriakova,Michael Zervas,Yuriy Fedoryshyn,Ueli Koch,Juerg Leuthold
DOI: https://doi.org/10.1021/acsphotonics.3c00834
IF: 7
2023-08-30
ACS Photonics
Abstract:Highly efficient coupling of light from an optical fiber to silicon nitride (SiN) photonic integrated circuits (PICs) is experimentally demonstrated with simple and fabrication-tolerant grating couplers (GC). Fully etched amorphous silicon gratings are formed on top of foundry-produced SiN PICs in a back-end-of-the-line (BEOL) process, which is compatible with 248 nm deep UV lithography. Metallic back reflectors are introduced to enhance the coupling efficiency (CE) from -1.11 to -0.44 dB in simulation and from -2.2 to -1.4 dB in experiments for the TE polarization in the C-band. Furthermore, these gratings can be optimized to couple both TE and TM polarizations with a CE below -3 dB and polarization-dependent losses under 1 dB over a wavelength range of 40 nm in the O-band. This elegant approach offers a simple solution for the realization of compact and, at the same time, highly efficient coupling schemes in SiN PICs.
physics, condensed matter,optics, applied,materials science, multidisciplinary,nanoscience & nanotechnology