Study on microstructure and mechanical properties of ZrN/TiSiN nanomultilayered films

zheng wei,li wei,meng jia,liu ping,ma fengcang,liu xinkuan,chen xiaohong,he daihua

DOI: https://doi.org/10.3969/j.issn.1001-9731.2016.01.008

2016-01-01

Abstract:This paper adopts the method of magnetron sputtering with using Zr target and TiSi composite target to get the successful preparation of different TiSiN layer thickness of ZrN/TiSiN nanometer multilayer films.Using X-ray diffraction(XRD),scanning electron microscope(SEM),high-resolution transmission electron microscopy(HRTEM)and nano indentation tester and other test methods to study the impact of different TiSiN layer thickness on the ZrN/TiSiN nanometer multilayer films of microstructure and mechanical properties.The results showed that with the increase of TiSiN layer thickness the coating is mainly composed of the ZrN face-centered cubic phase,ZrN phase crystallization degree increased before they are reduced and the hardness of coating increased before they are reduced.When TiSiN thickness was 0.7nm the coating had the highest hardness and elastic modulus(28.73,301.125GPa)that far more than ZrN monolayer film hardness.Strengthening effect of ZrN/TiSiN nanometer multilayer films can be made of Alternating stress field and modulus of differential theory to explain.