Preparation of two-dimensional molybdenum disulfide for NO2 detection at room temperature

Xin Yu,Ding Wang,Yuqiu Wang,Ji Yan,Xianying Wang
DOI: https://doi.org/10.1016/j.cclet.2019.11.032
IF: 9.1
2020-08-01
Chinese Chemical Letters
Abstract:<p>In this work, the two-dimensional MoS<sub>2</sub> film was prepared by sulfuring the molybdenum atomic layer on SiO<sub>2</sub>/Si substrate. The reaction temperature, heating rate, holding time and carrier gas flow rate were investigated comprehensively. The quality of MoS<sub>2</sub> film was characterized by optical microscopy, atomic force microscopy, Raman and photoluminescence spectroscopy. The characterization results showed that the optimum synthesis parameters were heating rate of 25 ℃/min, reaction temperature of 750 °C, holding time of 30 min and carrier gas velocity of 100 sccm. The MoS<sub>2</sub> gas sensor was fabricated and its gas sensing performance was tested. The test results indicated that the sensor had a good response to both reducing gas (NH<sub>3</sub>) and oxidizing gas (NO<sub>2</sub>) at room temperature. The sensitivity to 100 ppm of NO<sub>2</sub> was 31.3%, and the response/recovery times were 4 s and 5 s, respectively. In addition, the limit of detection could be as low as 1 ppm. This work helps us to develop low power and integrable room temperature NO<sub>2</sub> sensors.</p>
chemistry, multidisciplinary
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