Sol–gel Synthesis of 0.94(bi0.5na0.5)tio3–0.06batio3 Lead-Free Piezoelectric Films: Effect of Pyrolysis Temperature on Phase Evolution and Electrical Properties

Zhen Zhou,Wei Sun,Jing-Feng Li

DOI: https://doi.org/10.1007/s10971-015-3870-6

2015-01-01

Journal of Sol-Gel Science and Technology

Abstract:Sol–gel processing was applied to fabrication of 0.94(Bi0.5Na0.5)TiO3–0.06BaTiO3 (BNT–BT6) lead-free ferroelectric thin films on Pt(111)/Ti/SiO2/Si(100) substrates, whose phase structure and electrical properties were found to be greatly affected by the pyrolysis temperature. It was found that a large amount of pyrochlore phase formed in the films if pyrolysis was conducted around 350 °C; pyrolyzing at lower and higher temperatures in the range from 300 to 450 °C could avoid its formation even though other conditions are the same. The reasons are revealed by the DSC and TG experiments conducted in inert gas and air, and a phenomenological model was proposed with a focus on the thermal evolution of carbonaceous in pyrolysis and crystallization process. High-quality BNT–BT6 films with a relatively low surface roughness and a dense cross section were obtained by conducting the pyrolysis at the optimized temperature (400 °C), which also show the best ferroelectric and piezoelectric properties.