Abstract:Epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 (BST) (0.0≤x≤0.25) thin films were deposited on (100) LaAlO 3 substrates by pulsed laser ablation, the substrates having bottom electrodes made of 100-nm-thick conductive La 0.5 Sr 0.5 CoO 3 (LSCO). Extensive X-ray diffraction, rocking-curve, and φ-scan studies indicate that the graded films are (100)-oriented and exhibit good in-plane relationships of [010] BST //[010] LAO and [001] BST //[001] LAO . For the up-graded films with barium concentration (1-x) increasing across the film thickness in the direction from the film/substrate interface to the film surface, the full width at half maximum of the BST film (200) rocking curve and the surface roughness, examined by atomic force microscopy, were larger than those of the down-graded films with barium concentration decreasing from the film/substrate interface to the film surface. The dielectric properties of the graded films, measured using vertical structures, show that at room temperature, the dielectric constant (ε r ) and dissipation factor (cosδ) at 100 kHz were 380 and 0.013 for the up-graded films, and 650 and 0.010 for the down-graded films, respectively. The dielectric behavior was enhanced in the down-graded films, which was attributed to the fact that the pure BaTiO 3 layer in the down-graded BST films not only serves as a bottom layer but also acts as an excellent seeding layer for enhancing subsequent film growth, leading to better film crystallinity and larger grain sizes in the down-graded films. The graded BST films undergo a diffuse phase transition, giving a broad, flat capacitance-versus-temperature profile. With such a graded structure, it is possible to build a dielectric thin-film capacitor having a capacitance which has a low temperature dependence over a broad temperature regime.

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Microstructure and dielectric properties of compositionally-graded (Ba1−xSrx)TiO3 thin films

Dielectric and piezoelectric properties of the Ba0.92Ca 0.08Ti0.95Zr0.05O3 thin films grown on different substrate

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Preparation of epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 thin films with enhanced dielectric properties

Dielectric Properties and Microstructures of Ba 1−x Sr X TiO 3 Epitaxial Thin Films with Compositional Gradients Normal to the Substrates

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Study of Structural and Dielectric Properties of Ba<sub>0.6</sub>Sr<sub>0.4</sub>(Zr<sub>X</sub>Ti<sub>1-X</sub>)O<sub>3</sub> Ceramic

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Epitaxial Growth and Dielectric Properties of Functionally Graded (ba1−xsrx)tio3 Thin Films with Stoichimetric Variation

Composition-dependent crystal structure, dielectric properties and temperature stability of the (1-x)CaZrO3-xSrTiO3 paraelectric thin films

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The Roles of B-Site Ions in Lead Strontium Zirconate Titanate Thin Films for Electrically Tunable Device Applications