All‐Dielectric Meta‐Reflectarray for Efficient Control of Visible Light

Shang Sun,Zhenxing Zhou,Chen Zhang,Wenhong Yang,Qinghai Song,Shumin Xiao

DOI: https://doi.org/10.1002/andp.201700418

2017-01-01

Annalen der Physik

Abstract:Wide‐bandgap material based all‐dielectric metasurfaces have been ideal platforms for the realization of arbitrary phase control in visible spectrum. While TiO 2 metasurfaces are very promising in broadband and high‐efficiency anomalous transmission, meta‐hologram, and meta‐lenses et al., the current realizations are strongly dependent on the sophisticated fabrication technique to fabricate TiO 2 nano‐pillars with aspect ratio > 10. Herein we experimentally demonstrate a much simpler approach to realize efficient phase control of visible light. By exploiting TiO 2 nano‐blocks as meta‐atoms on a ground metal plane, we find that TiO 2 metasurface with aspect ratio around 1‐1.5 is good enough to produce phase changes covering ‐π to π and high reflection efficiency simultaneously. Based on the phase control of the meta‐reflectarray, anomalous reflection with a ratio between anomalous reflection and normal reflection ∼ 74/26 have been experimentally realized using a combination of typical electron‐beam lithography, electron‐beam evaporation, and a simple lift‐off process. Similarly, high performance TiO 2 metasurface in form of hologram has also been demonstrated for red (633 nm), green (520 nm), and blue (445 nm) wavelengths. We believe this research shall route a new way to cost‐effective all‐dielectric metasurfaces and advance their applications in encryption, anti‐counterfeiting, and wearable displays.