Zhenpeng Zhou,Juntao Li,Rongbin Su,Beimeng Yao,Hanlin Fang,Kezheng Li,Lidan Zhou,Jin Liu,Daan Stellinga,Christopher P Reardon,Thomas F Krauss,Xuehua Wang
Abstract:Dielectric metasurfaces require high refractive index contrast materials for optimum performance. This requirement imposes a severe restraint; devices have either been demonstrated at wavelengths of 700nm and above using high-index semiconductors such as silicon, or they use lower index dielectric materials such as TiO$_{2}$ or Si$_{3}$N$_{4}$ and operate in the visible wavelength regime. Here, we show that the high refractive index of silicon can be exploited at wavelengths as short as 532 nm by demonstrating a silicon metasurface with a transmission efficiency of 47% at this wavelength. The metasurface consists of a graded array of silicon posts arranged in a square lattice on a quartz substrate. We show full 2{\pi} phase control and we experimentally demonstrate polarization-independent beam deflection at 532nm wavelength. The crystalline silicon is placed on a quartz substrate by a bespoke layer transfer technique and we note that an efficiency >70% may be achieved for a further optimized structure in the same material. Our results open a new way for realizing efficient metasurfaces based on silicon in the visible wavelength regime.
What problem does this paper attempt to address?
The problem that this paper attempts to solve is: to achieve a highly efficient, polarization - independent silicon - based metasurface in the visible light band (especially at a wavelength of 532 nm). Specifically, the research aims to overcome the problems of high absorption loss and low efficiency of traditional silicon materials in the visible light band. By using single - crystal silicon (c - silicon) and combining with a specific layer transfer technology, an efficient silicon - based metasurface is designed to achieve precise control of the light wavefront.
### Main problems and challenges:
1. **Requirement for high - refractive - index materials**: In order to achieve optimal performance, the metasurface requires materials with a high refractive - index contrast. However, in the visible light band, most devices either use high - refractive - index semiconductors such as silicon (but are usually limited to above 700 nm), or use lower - refractive - index dielectric materials such as TiO₂ or Si₃N₄ (these materials perform well in the visible light band, but require a very high aspect ratio, leading to increased manufacturing difficulties).
2. **Absorption loss in the visible light band**: Traditional amorphous silicon (a - silicon) or poly - silicon has a relatively high absorption loss in the visible light band, which limits its application. In contrast, single - crystal silicon (c - silicon) has a significantly reduced absorption loss when the wavelength is greater than 500 nm, but it is difficult to be directly deposited on a transparent substrate.
3. **Manufacturing complexity**: In order to achieve full 2π phase control, a very high aspect - ratio structure is usually required, which increases the manufacturing difficulty. For example, the aspect ratio of TiO₂ nanofins needs to reach 10 - 15, while the aspect ratio of the single - crystal silicon metasurface proposed in this paper is only 2.47, which greatly simplifies the manufacturing process.
### Solutions:
- **Material selection**: Use single - crystal silicon (c - silicon) because it has a lower absorption loss and a high refractive index (nc - si = 4.142, kc - si = 0.0324) in the visible light band, and it can be transferred to a transparent quartz substrate through the layer transfer technology.
- **Layer transfer technology**: By transferring 220 - nm - thick single - crystal silicon from an SOI wafer to a quartz substrate, the problem that single - crystal silicon is difficult to be directly deposited on a transparent substrate is solved.
- **Structural design**: A circular silicon pillar array based on a square - lattice arrangement is designed. By changing the diameter of the silicon pillars, full 2π phase control is achieved, and a polarization - independent beam deflection effect is demonstrated.
### Experimental results:
- At a wavelength of 532 nm, the experimentally measured transmission efficiency is 47%, and the simulation results show that it can be up to 71%.
- A deflection angle of 20.48° is achieved, which is consistent with the theoretical calculation.
- The polarization - independent characteristic has been verified, and the efficiency change in different polarization directions is only about 5%.
### Significance:
This research provides a new method for achieving highly efficient, polarization - independent metasurfaces in the visible light band, especially making important progress in the application of single - crystal silicon. This result is not only applicable to beam deflection, but can also be extended to other wavefront - shaping applications, such as focusing, vortex generation, and holographic imaging. In addition, this method also makes it possible for tunable metasurfaces on flexible substrates, and is expected to be applied in fields such as integrated optics, biomedicine, and wearable consumer electronics.