FBG Incorporated Side-open Fabry-Perot Cavity for Simultaneous Gas Pressure and Temperature Measurements

Shengnan Wu,Guofeng Yan,Chengliang Wang,Zhenggang Lian,Xiang Chen,Sailing He
DOI: https://doi.org/10.1109/jlt.2016.2588521
IF: 4.7
2016-01-01
Journal of Lightwave Technology
Abstract:A dual-parameter sensing structure based on a fiber Bragg grating (FBG) incorporated side-open Fabry-Perot cavity (FPC) is proposed and experimentally demonstrated for simultaneous measurements of gas pressure and temperature. The side-open FPC consisted of a micro-piece of chemical etched side-hole fiber acts as a pressure sensing unit. Two samples with different cavity lengths of 60 mu m and 100 mu m were fabricated and tested for gas pressure and temperature sensing in the experiment. Linear gas pressure responses of 4.063 pm/kPa and 4.071 pm/kPa in a large measuring range of 0-1000 kPa were obtained, respectively, which agree well with the theoretical analysis. Meanwhile, the temperature cross-sensitivities were measured as 214 Pa/degrees and 204 Pa/degrees. As a local temperature monitor, the incorporation of a short FBG in the leading single mode fiber was used to compensate the temperature cross-sensitivity of the sensor. This kind of compact and highly sensitive fiber sensor is appropriate for simultaneous gas pressure and temperature sensing in harsh micro environment.
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