Fabrication of amorphous AlMo 0.5 NbTa 0.5 TiZr RHEA coatings and the impact of deposition temperature on microstructure and properties
Zijian Geng,Jian Peng,Zhigang Xu,Zhengfa He,Xiang Guo,Wenjun Li,Chuanbin Wang,Lianmeng Zhang
DOI: https://doi.org/10.1016/j.surfcoat.2024.131036
IF: 4.865
2024-06-21
Surface and Coatings Technology
Abstract:In this study, protective AlMo 0.5 NbTa 0.5 TiZr refractory high-entropy alloy coatings were prepared by DC magnetron sputtering, and the influence of deposition temperature on the microstructure, deposition rate, mechanical properties, and adhesion force was investigated in detail. All coatings are in a nearly amorphous state. Their elastic recovery ratio (η w ), microhardness (H), elastic strain failure strength (H/E), plastic deformation strength (H 3 /E 2 ), and adhesion force (L c2 ) are positively correlated with deposition temperature mainly attributing to the synergy of increased thickness and the generation of the nanocrystal. The coating reaches its maximum η w , H, H/E, H 3 /E 2 , and L c2 of 43.87 ± 0.94 %, 12.74 ± 0.37 GPa, 0.073 ± 0.002, and 0.067 ± 0.005 GPa at the deposition temperature of 500 °C and exhibits superior wear resistance and resistance to plastic deformation, compared with reported refractory Cr and α-Ta coatings.
materials science, coatings & films,physics, applied