Abstract:ZnO nanopillars are often grown on various substrates by catalytic growth processes through a vapor-liquid-solid (VLS) mechanism. However, on silicon substrates, even with the catalyzed growth processes, it is still very difficult to obtain highly oriented ZnO nanopillar arrays. In this work, it was found that in most cases the actual growth process of ZnO on Si catalyzed by Au was not of real VLS character. In the initial growth stage, the substrate surface is partially melted and then oxidized into a very thin layer of SiO2. Zn-rich alloys instead of ZnO are first deposited on the SiO2/Si substrates and form polycrystalline hillocks in an atmosphere with low O-2 partial pressure. The difficulty for ZnO to nucleate on SiO2/Si is another reason preventing ZnO nanopillars from growing epitaxially on the substrates. Defects, steps, and/or stress on the substrate surfaces may support the nucleation process and thus may influence the initial growth stage and the control of the growth orientation of the pillars. With the help of scratches on Si substrates and by avoiding the formation of hillocks, well-aligned ZnO nanopillars were obtained both on Si (111) and (100) surfaces. Sharp photoluminescence (PL) peaks of bound exciton emissions and a free exciton emission were detected at low temperature. An unreported PL peak at about 3.367 eV and in some cases a donor-acceptor-pair transition at about 3.308 eV were also found. At higher temperature, a band-acceptor recombination process together with strong LO-phonon replicas occurred. A donor dopant concentration N-D of about 5.7x10(18) cm(-3) and an acceptor ionization energy of 126 +/- 2 meV were evaluated from the spectra.

Three-dimensional Deposition of ZnO Thin Layer on Nanopatterned Silicon Substrate

Fabrication of in Situ Ultrathin Anodic Aluminum Oxide Layers for Nanostructuring on Silicon Substrate

The Effects of Porous Silicon on the Crystalline Properties of ZnO Thin Films

Large-Scale Preparation of Uniform Nanopatterned Silicon Substrates by Inductively Coupled Plasma Etching Using Self-Assembled Anodic Alumina Masks

ZnO nanostructure networks grown on silicon substrates

Atomic layer deposition of ZnO on thermal SiO 2 and Si surfaces using N 2-diluted diethylzinc and H 2O 2 precursors

A Novel Synthesis of ZnO Nanoflower Arrays Using a Lift-Off Technique with Different Thicknesses of Al Sacrificial Layers on a Patterned Sapphire Substrate

Controllable Fabrication of Silicon Nanopore Arrays by Two-Step Inductively Coupled Plasma Etching Using Self-Assembled Anodic Aluminum Oxide Mask

Optical and Electrochemical Properties of a Nanostructured ZnO Thin Layer Deposited on a Nanoporous Alumina Structure via Atomic Layer Deposition

Aligned ZnO Nanorod Arrays Fabricated on Si Substrate by Solution Deposition

Au-Catalyzed Growth Processes And Luminescence Properties Of Zno Nanopillars On Si

Growth and optical properties of ZnO nanorods on the full surface of porous silicon by sol–gel method and oil bath method

Well-ordered ZnO Nanotube Arrays and Networks Grown by Atomic Layer Deposition

Polystyrene-microsphere-assisted patterning of ZnO nanostructures: growth and characterization.

Selective Area Growth of High-Quality ZnO Nanosheets Assisted by Patternable AlN Seed Layer for Wafer-Level Integration

High-Resolution Nanosphere Lithography (nsl) to Fabricate Highly-Ordered Zno Nanorod Arrays

Porous Nc-Si/siox Nanostructured Layer on Si Substrate with Tunable Photoluminescent Properties Fabricated by Direct, Precursor-Free Microplasma Irradiation in Air

Electrochemical Synthesis of ZnO Nanoflowers and Nanosheets on Porous Si As Photoelectric Materials

Pulsed Laser Deposition of ZnO Honeycomb Structures on Metal Catalyst Prepatterned Si Substrates

Fabrication and Optical Properties of Highly Ordered ZnO Nanodot Arrays

Low-temperature Growth and Raman Scattering Study of Vertically Aligned ZnO Nanowires on Si Substrate