Abstract:A hydrothermal method to grow vertical-aligned ZnO nanorod arrays on ZnO films obtained by atomic layer deposition (ALD) is presented. The growth of ZnO nanorods is studied as function of the crystallographic orientation of the ZnO films deposited on silicon (100) substrates. Different thicknesses of ZnO films around 40 to 180 nm were obtained and characterized before carrying out the growth process by hydrothermal methods. A textured ZnO layer with preferential direction in the normal c-axes is formed on substrates by the decomposition of diethylzinc to provide nucleation sites for vertical nanorod growth. Crystallographic orientation of the ZnO nanorods and ZnO-ALD films was determined by X-ray diffraction analysis. Composition, morphologies, length, size, and diameter of the nanorods were studied using a scanning electron microscope and energy dispersed x-ray spectroscopy analyses. In this work, it is demonstrated that crystallinity of the ZnO-ALD films plays an important role in the vertical-aligned ZnO nanorod growth. The nanorod arrays synthesized in solution had a diameter, length, density, and orientation desirable for a potential application as photosensitive materials in the manufacture of semiconductor-polymer solar cells. PACS: 61.46.Hk, Nanocrystals; 61.46.Km, Structure of nanowires and nanorods; 81.07.Gf, Nanowires; 81.15.Gh, Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.).

Aligned ZnO Nanorod Arrays Fabricated on Si Substrate by Solution Deposition

Hydrothermal Synthesis of Well-Aligned ZnO Nanorod Arrays on Silicon

Conversion of large-scale oriented ZnO rod array into nanotube array under hydrothermal etching condition via one-step synthesis approach

A large-scale-oriented ZnO rod array grown on a glass substrate via an in situ deposition method and its photoconductivity

Alignment-controlled Hydrothermal Growth of Well-Aligned ZnO Nanorod Arrays

Aligned ZnO Nanorods with Tunable Size and Field Emission on Native Si Substrate Achieved Via Simple Electrodeposition

Oriented growth of ZnO nanostructures on Si and Al substrates

Synthesis of Monodispersed Zno Nanorod Array Films by Chemical Solution Deposition.

Arrays of ZnO Nanowires Fabricated by a Simple Chemical Solution Route

ZnO Nanorod Arrays: Field-assisted Growth in Aqueous Solution and Field Emission Properties

Preparation of ZnO Nanorod Arrays by Seed-assisted Chemical Bath Deposition Method

Low-temperature Growth and Raman Scattering Study of Vertically Aligned ZnO Nanowires on Si Substrate

Size-controllable Growth of ZnO Nanorods on Si Substrate

Eutectic Condensation and Nucleation in Vapor-Liquid-Solid Grown Zno Nanorod Arrays on Si Substrate

Growth of vertically aligned ZnO nanorods using textured ZnO films

Synthesis and Optical Properties of Well-Aligned ZnO Nanorod Array on an Undoped ZnO Film

Growth of Arrayed ZnO Nanowires Using a Solution Method

Well-aligned ZnO Nanowires Grown on Si Substrate Via Metal–organic Chemical Vapor Deposition

Synthesis of aligned ZnO submicron rod arrays by heating zinc foil covered with ZnCl2 solution

Bio-inspired Fabrication of ZnO Nanorod Arrays and Their Optical and Photoresponse Properties

Heteroepitaxial Growth of ZnO Nanorod Arrays on GaAs (111) Substrates by Electrochemical Deposition