Abstract:The scheduling problem of actual semiconductor production process is of large scale,uncertainty,complicated con-straints and multiple objectives,and the optimization of the process depends upon a timely and efficient dynamic scheduling.Consid-ering the multi-reentrant characteristic of semiconductor wafer fabrication and the influence of rush orders upon regular orders,a Drum-Buffer-Rope (DBR)theory and Adaptive Neuro-Fuzzy Inference System (ANFIS)integrated dynamic scheduling algorithm is proposed.Firstly,a DBR optimization algorithm based on the combination of releasing control and lots scheduling is designed, aiming at maximizing the effective capacity of bottleneck equipment and ensuring the wafer fabrication load in a balance.Secondly, using the historical and real-time data obtained in the wafer fabrication,a prediction model of rush orders is constructed on the basis of ANFIS.Thirdly,the prediction result is integrated with the DBR algorithm combined with the experts’knowledge and practice experiment,to adjust the wafer fabrication before rush orders come,which guarantees that the rush order could be completed effec-tively,and reduces the interplay between the rush order and the regular one.The proposed scheduling algorithm is simulated on a certain semiconductor wafer fabrication system,and the result shows that the method can realize the multi-objective optimization and provide reference to the practical semiconductor wafer fabrication scheduling.

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