Abstract:Abstract With the development of integrated circuit technology, especially after entering the sub-micron process, the reduction of critical dimensions and the realization of high-density devices, the flatness between integrated circuit material layers is becoming more and more critical. Because conventional mechanical polishing methods inevitably produce scratches of the same size as the device in metal or even dielectric layers, resulting in depth of field and focus problems in lithography. The first planarization technique to achieve application is spin on glass (SOG) technology. However, this technology will not only introduce new material layers, but will also fail to achieve the global flattening required by VLSI and ULSI technologies. Moreover, the process instability and uniformity during spin coating do not meet the high flatness requirements of the wafer surface. Also, while some techniques such as reverse etching and glass reflow can achieve submicron level regional planarization. After the critical dimension reaches 0.35 microns (sub-micron process), the above methods cannot meet the requirements of lithography and interconnect fabrication. In the 1980s, IBM first introduced the chemical mechanical polishing (CMP) technology used to manufacture precision optical instruments into its DRAM manufacturing [1]. With the development of technology nodes and critical dimensions, CMP technology has been widely used in the Front End Of Line (FEOL) and Back End Of Line (BEOL) processes [2]. Since the invention of chemical mechanical polishing, scientists have not stopped studying its internal mechanism. From the earliest Preston Formula (1927) to today’s wafer scale, chip scale, polishing pad contact, polishing pad - abrasive - wafer contact and material removal models, there are five different scale models from macro to the micro [3]. Many research methods, such as contact mechanics, multiphase flow kinetics, chemical reaction kinetics, molecular dynamics, etc., have been applied to explain the principles of chemical mechanical polishing to establish models. This paper mainly introduces and summarizes the different models of chemical mechanical polishing technology. The various application scenarios and advantages and dis-advantages of the model are discussed, and the development of modeling technology is introduced.

Mechanical Model of Nanoparticles for Material Removal in Chemical Mechanical Polishing Process

A chemical mechanical polishing model incorporating both the chemical and mechanical effects

Molecular Modeling of the Mechanical Effect in the Chemical Mechanical Polishing Process

A Model for Mechanical Wear and Abrasive Particle Adhesion during the Chemical Mechanical Polishing Process

Non-continuum Material Removal Mechanism of Surface Polishing with Ultra Precision

Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling

Analytical Modelling of Material Removal in Copper Chemical Mechanical Polishing Incorporating the Scratch Hardness of the Passivated Layer on Copper Thin Film Wafer

A Chemical Mechanical Polishing Model Based on the Viscous Flow of the Amorphous Layer

A Coupled Material Removal Model for Chemical Mechanical Polishing Processes

Progress in Material Removal Mechanisms of Surface Polishing with Ultra Precision

Mechanical Model of Single Abrasive During Chemical Mechanical Polishing: Molecular Dynamics Simulation

Effects of Nano-Scale Particles in Chemical Mechanical Polishing Process

Mechanism and Applications of Chemical and Mechanical Polishing

Chemical mechanical polishing: Theory and experiment

Wear phenomena in chemical mechanical polishing

A plasticity-based model of material removal in chemical-mechanical polishing (CMP)

Review on modeling and application of chemical mechanical polishing

Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon

Investigation of Material Removal Mechanism of Silicon Wafer in the Chemical Mechanical Polishing Process Using Molecular Dynamics Simulation Method

Mechanical aspects of the chemical mechanical polishing process: A review

A Theoretical Model Incorporating Both the Nano-Scale Material Removal and Wafer Global Uniformity During Planarization Process