Abstract:Self‐organization driven by femtosecond‐laser texturing of crystalline Si in oxidation‐preventing methanol allows to create diverse anti‐reflective surface morphologies controlled by laser processing parameters. Electromagnetic processes dominating at initial steps of the progressive grating‐type morphology evolution define the onset of the hydrodynamic processes and resulting random spiky morphology upon subsequent multi‐pulse exposure. Upon systematic studies of femtosecond‐laser processing of monocrystalline Si in oxidation‐preventing methanol, it is shown that the electromagnetic processes dominating at initial steps of the progressive morphology evolution define the onset of the hydrodynamic processes and morphology upon subsequent multi‐pulse exposure. Under promoted exposure quasi‐regular subwavelength laser‐induced periodic surface structures (LIPSSs) are justified to evolve through the template‐assisted development of the Rayleigh‐Plateau hydrodynamic instability in the molten ridges forming quasi‐regular patterns with a supra‐wavelength periodicity and preferential alignment along polarization direction of the incident light. Subsequent exposure promotes fusion‐assisted morphology rearrangement resulting in a spiky surface with random orientation, yet constant inter‐structure distance correlated with initial LIPSS periodicity. Along with the insight onto the physical picture driving the morphology evolution and supra‐wavelength nanostructure formation, this experiments also demonstrated that resulting quasi‐regular and random spiky morphology can be tailored by the intensity/polarization distribution of incident laser beam allowing on‐demand surface nanotexturing with diverse hierarchical surface morphologies exhibiting reduced reflectivity at visible and shortwave‐IR wavelengths. Finally, the practical attractiveness of the suggested approach for improving near‐IR photoresponse and expanding operation spectral range of vertical p‐n junction Si photodetector operating under room temperature and zero‐bias conditions via single‐step annealing‐free nanopatterning is highlighted.

Low-reflectance Laser-Induced Surface Nanostructures Created with a Picosecond Laser

Picosecond Laser-Induced Periodic Surface Structures (LIPSS) on Crystalline Silicon

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Extremely Regular Periodic Surface Structures in a Large Area Efficiently Induced on Silicon by Temporally Shaped Femtosecond Laser

Liquid‐Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser‐Induced Periodic Surface Structures

Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

Hierarchical Anti-Reflective Laser-Induced Periodic Surface Structures (lipsss) on Amorphous Si Films for Sensing Applications

Periodic Silicon Surface Structures Fabricated by Infrared Nanosecond Pulse Laser Ablation in Ambient Air for Enhanced Anti-Reflection

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Anisotropy Modulations of Femtosecond Laser Pulse Induced Periodic Surface Structures on Silicon by Adjusting Double Pulse Delay.

Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

Coherence effects in LIPSS formation on silicon wafers upon picosecond laser pulse irradiations

High Performance Light Trapping Structures for Si-Based Photoelectronics Fabricated by Hybrid Picosecond Laser Irradiation and Chemical Corrosion

Two-dimensional periodic surface nanotexturing of 6H-SiC by ultrashort laser pulses

Polarization-Dependent Anisotropy of LIPSSs' Morphology Evolution on a Single-Crystal Silicon Surface

Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

Ultrafast Dynamics of Femtosecond Laser-Induced High Spatial Frequency Periodic Structures on Silicon Surfaces

Black Silicon Created by Interfered Femtosecond Laser Illumination

Multi-scale Micro-Nano Structures Prepared by Laser Cleaning Assisted Laser Ablation for Broadband Ultralow Reflectivity Silicon Surfaces in Ambient Air