Periodic structure with a periodicity of 2–3.5 μm on crystalline TiO 2 induced by unpolarized KrF excimer lasers

Rong He,Hongliang Ma,Jiahui Zheng,Yongmei Han,Yuming Lu,Chuanbing Cai
DOI: https://doi.org/10.1007/s00339-016-0257-7
2016-01-01
Applied Physics A
Abstract:Laser-induced periodic surface structures (LIPSS) were processed on the TiO 2 bulk surface under the irradiation of 248 nm unpolarized KrF excimer laser pulses in air. Spatial LIPSS periods ranging from 2 to 3.5 μm are ascribed to the capillary wave. These microstructures were analyzed at different laser pulse numbers with the laser energy from 192 to 164 mJ. The scanning electron microscopy results indicated eventually stripes that have been disrupted as the increase in the laser pulse numbers, which is reasonably explained by the energy accumulating effect. In addition, investigations were concentrated on the surface modifications at pre-focal plane, focal plane and post-focal plane in the same defocusing amount. Compared with condition at pre-focal plane, in addition to the plasma produced at target, the air was also breakdown for the situation of post-focal plane. So it was reasonable that stripes appeared at pre-focal plane but not at post-focal plane.
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