Abstract:This article proposes a digital control structure for a doubly decoupled gyroscope working in the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops (PLLs), which demodulates the angular rate signal directly from the readable digital gyroscope resonance frequency, eliminating the need for specific frequency readout circuits. The resonance frequencies of the LFM gyroscope working modes contain a mode mismatch frequency modulated by input angular rate, respectively, which are tracked by two digital PLLs followed by subsequent digital demodulation and filtering. A linearized model of the digital PLL is built to analyze noise and control characteristics for different PI parameters. The impact of different amplitude–phase extraction architectures on the extracted phase signal is also addressed in this article. Contrast experiments are carried out using the same gyroscope with large internal thermal stress due to the silicon-glass bonding process and no stress relief structure around the sensing element, working in the traditional amplitude-modulated (AM) mode and the LFM mode. Overall, the LFM working mode maintains its low-temperature sensitivity and high stability in spite of the large internal thermal stress in the gyroscope compared to AM working modes. The maximum scale factor variation over the temperature range from 10 °C to 50 °C is 1000 ppm for the LFM mode compared to 51 900 ppm for the AM closed mode. The maximum zero rate output drift over the same temperature range is 0.1248 °/s for the LFM mode and 10.7139 °/s for the AM closed mode. The scale factor nonlinearity is 329 ppm with an angular rate input range of ±50 °/s for the LFM mode compared to 1902 ppm for the AM closed mode. The LFM mode zero-bias fluctuation for ten days is less than 0.12 °/s. The angle random walk (ARW) and the bias instability (BI) of the LFM gyroscope are 0.316 °/ $\surd \text{h}$ and 2 °/h, respectively.

A 0.23- $\mu \text{g}$ Bias Instability and 1- $\mu \text{g}/\surd $ Hz Acceleration Noise Density Silicon Oscillating Accelerometer with Embedded Frequency-to-Digital Converter in PLL

A 0.23 Μg Bias Instability and 1.6 Μg/hz1/2 Resolution Silicon Oscillating Accelerometer with Build-in Σ-Δ Frequency-to-digital Converter

A 0.23 mu g Bias Instability and 1.6 mu g/Hz(1/2) Resolution Silicon Oscillating Accelerometer with Build-in Sigma-Delta Frequency-to-Digital Converter

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

A 0.4 $\mu \text{g}$ Bias Instability and 1.2 $\mu \text{g}/\surd $ Hz Noise Floor MEMS Silicon Oscillating Accelerometer with CMOS Readout Circuit

A 27μW MEMS silicon oscillating accelerometer with bias instability and 10-μg/√Hz noise floor

A 27 Mu W Mems Silicon Oscillating Accelerometer With 4-Mu G Bias Instability And 10-Mu G Root Hz Noise Floor

27.2 A1.2μg/√Hz-resolution 0.4Μg-Bias-instability MEMS Silicon Oscillating Accelerometer with CMOS Readout Circuit

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

A Cmos Readout Circuit For Soi Resonant Accelerometer With 4-Mu G Bias Stability And 20-Mu G/Root Hz Resolution

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

A CMOS Readout Circuit for SOI Resonant Accelerometer with 4-μg bias stability and 20-μg/Hz 1/2 resolution A CMOS Readout Circuit for SOI Resonant Accelerometer with 4-μg bias stability and 20-μg/Hz 1/2 resolution

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

A low power MEMS-ASIC silicon resonant accelerometor with sub-µg bias instability and ±30g full-scale

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

A CMOS Readout Circuit for SOI Resonant Accelerometer With 4- $\mu \rm g$ Bias Stability and 20- $ \mu\rm g/\sqrt{{\hbox{Hz}}}$ Resolution

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

A CMOS Readout Circuit for Silicon Resonant Accelerometer with 32-ppb bias stability

A 0.57°/h Bias Instability 0.067°/√h Angle Random Walk MEMS Gyroscope with CMOS Readout Circuit

A 0.5 Degrees/H Bias Instability 0.067 Degrees/Root H Angle Random Walk Mems Gyroscope With Cmos Readout Circuit