Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil

Yong Liu,Jing Ting Luo,Chao Zhao,Jian Zhou,Sameer Ahmad Hasan,Yifan Li,Michael Cooke,Qiang Wu,Wai Pang Ng,Jiang Feng Du,Qi Yu,Yang Liu,Yong Qing Fu
DOI: https://doi.org/10.1109/ted.2016.2610466
IF: 3.1
2016-01-01
IEEE Transactions on Electron Devices
Abstract:This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 mu m thick were deposited onto aluminum foils (50 mu m thick) using magnetron sputtering and then annealed in air at different temperatures between 300 degrees C and 500 degrees C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 degrees C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.
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