A Radius Error Compensation Model Of Touch Trigger Probes In On-Machine Verification System

Han Ru-cong,Zhang Jian-fu,Feng Ping-fa,Yu Ding-wen
2014-01-01
Abstract:This paper analyses the major components and influencing factors of the radius error of touch trigger probes used in on-machine verification system. A probe radius error compensation model, an implementation procedure and an experimental study are presented. The error compensation has been successfully performed with BP artificial neural network model optimized by genetic algorithm. Based on the normal vector of measured points, it predicts the probe radius errors, establishes the mapping between the probe radius errors and the normal vector of measured points, and corrects the data of on-machine verification. The experimental results indicate that the predicted probe radius errors based on the proposed model have good consistency with the measured values. The residual errors after error correction are approaching the minimum. 65% of the residual errors in the test sample are less than 1um, and the average is 0.94um.
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