Analysis and Modeling of the Radius Error of Touch Trigger Probes in On-machine Verification System

HAN Ru-cong,ZHANG Jian-fu,FENG Ping-fa,YU Ding-wen
DOI: https://doi.org/10.13462/j.cnki.mmtamt.2014.12.016
2014-01-01
Abstract:This paper analyses the major components and influencing factors of the radius error of touch trig-ger probes about on-machine verification system. An effective probe radius error modeling and compensa-tion, an implementation procedure and an experimental study are presented. The error compensation model has been built with BP artificial neural network optimized by Genetic algorithm. According to the normal vector information of measurement points, predicting the probe radius error values and establishing the map-ping relationship with the normal vector of measurement points, and correcting on-machine verification data off-line or on-line by the computer. The results of experiment have shown that the predictive values based the model and the actual probe radius errors have good consistency. 65% of the residual error in the test sample is less than 1μm, maximμm is 2. 9μm and the average value is 0. 94μm.
What problem does this paper attempt to address?