Effect of Rectangular Radio-Frequency Voltage Amplitude on Performance of A Miniature High-Field Asymmetric Waveform Ion Mobility Spectrometric Sensor Chip

Li Hua,Tang Fei,Wang Xiao-Hao,Zhang Liang,Yang Ji,Wang Fan,Xu Chu-Long,Lin Tao,Ding Li
DOI: https://doi.org/10.3724/sp.j.1096.2010.01678
2010-01-01
Abstract:A miniature high-field asymmetric waveform ion mobility spectrometry (FAIMS) sensor chip based on micro-electro-mechanical-system (MEMS) technology was reported. The chip with dimension of 18.8 mm x 12.4 mm 1.2 mm was fabricated by inductively coupled plasma (ICP) etching on the two sides of silicon and double silicon-glass bonding. The dimension of the drift tube is 10 mm x 5 mm x 0.2 mm. The high-field rectangular asymmetric power with the peak-to-peak voltage of 1000 V at the maximum frequency of 2 MHz and the duty cycle of 20% -50% was designed. The ethanol was adopted to illustrate the influence of rectangular radio-frequency (RF) voltage amplitude on the performance of FAIMS sensor chip. The experiment results show that, with the voltage amplitude increasing, the FAIMS resolution and compensation voltage increase while the sensitivity decreases. And the detection of ethanol at concentration as low as 8.9 mg/m(3) has been demonstrated.
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