Fiber probe based on dispersive interferometry with an improved demodulation algorithm
Yuming Chen,Ze Chen,Jiwen Cui,Haiying Zhao,Yunlong Wang,Huining Zhao,Jiubin Tan
DOI: https://doi.org/10.1109/TIM.2024.3385815
IF: 5.6
2024-01-01
IEEE Transactions on Instrumentation and Measurement
Abstract:We present a micro fiber probe based on dispersive interferometry (FPDI) for measuring high aspect ratio structures with an improved demodulation algorithm and offset correction method. To accommodate the need for weak signal-to-noise signal demodulation and accurate measurements in FPDI’s applications, we propose a composite algorithm for dispersive interferometry to improve the accuracy and noise immunity. Then, in order to simplify the alignment process of the fiber probe, we propose an offset correction method based on optimization algorithm. Experiment results show that fiber probe with our proposed algorithm has less repeatability error and linearity in applications than using traditional algorithms. The axial resolution of fiber probe is better than 0.1 μm, with the repeatability error of 0.011 μm and the linearity of 0.03%. In addition, we measure a 1.2 mm standard ring gauge with FPDI. After correcting the offset, the difference between the measured diameter and the standard value is less than 0.03%.