Abstract:Uniform, metal‐catalyst‐free graphene grown directly on dielectric substrate enables the creation of biosensor chips with high yields and cutting‐edge performances (328 of 384 devices on a 4‐inch wafer). To fabricate label‐free and rapid‐resulting semiconducting biosensor devices incorporating graphene, it is pertinent to directly grow uniform graphene films on technologically important dielectric and semiconducting substrates. However, it has long been intuitively believed that the nonideal disordered structures formed during direct growth, and the resulted inferior electrical properties will inevitably lead to deteriorated sensing performance. Here, graphene biosensor chips are constructed based on direct plasma‐enhanced chemical vapor deposition (PECVD) grown graphene on a 4‐inch silicon wafer with excellent film uniformity and high yield. To surprise, optimal operations of graphene biosensors permit ultrasensitive detection of SARS‐CoV‐2 virus nucleocapsid protein with dilutions down to sub‐femtomolar concentrations. Such impressive limit of detection (LOD) is comparable to or even outperforms that of the state‐of‐the‐art biosensor devices based on high‐quality graphene. Further noise spectral characterizations and analysis confirms that the LOD is limited by molecular diffusion and/or known interference signals such as drift and instability of the sensors, rather than the electrical merits of the graphene devices along. Hence, result sheds light on processing directly grown PECVD graphene into high‐performance sensor devices with important economic benefits and social significance.

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