Design of a Graphene Capacitive Pressure Sensor for Ultra-Low Pressure Detection

Yangxi Zhang,Yiming Gui,Fanrui Meng,Chengchen Gao,Yilong Hao
DOI: https://doi.org/10.1109/nems.2016.7758230
2016-01-01
Abstract:This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected sensor array is designed to achieve detectable capacitance change and redundancy. In calculation, a sensor array with 40,000 5μm radius suspend graphene diaphragm cells in 4mm×4mm size can provide 288fF/Pa sensitivity to pressure load.
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