A 1.2V 8.3nJ energy-efficient CMOS humidity sensor for RFID applications

Zhichao Tan,Youngcheol Chae,Roel Daamen,Aurelie Humbert,Youri V. Ponomarev,Michiel A. P. Pertijs
DOI: https://doi.org/10.1109/VLSIC.2012.6243771
2012-01-01
Abstract:A CMOS fully-integrated humidity sensor for a RFID sensor platform has been realized in 0.16μm CMOS technology. It consists of a top-metal finger capacitor, covered by a humidity-sensitive polyimide layer, and an energy-efficient inverter-based capacitance-to-digital converter (CDC). Measurements show that the CDC performs a 12.5-bit conversion in 0.8ms while consuming only 8.6μA from a 1.2V supply. Together with the co-integrated humidity sensor, this translates into a resolution of 0.05% RH in the range of 30% RH to 90% RH, at an energy consumption of only 8.3nJ per measurement.
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