Decoupling Control Based on Dynamic Model of 4-DOF Wafer Handling Robot.

Lei Yang,Nianfeng Wang
DOI: https://doi.org/10.1007/978-3-319-22873-0_50
2015-01-01
Abstract:To provide high velocity and performance, a dynamic model based on 4-DOF wafer handling robot in semiconductor industry is setup in the paper, formulas are derived, and also stability proof is given. In the final part of paper the experiment result of decoupling control is given, and it verified the correction of dynamic formulas.
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