Abstract:The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most AFMs use micro-machined force sensors made from silicon, but piezoelectric quartz sensors are applied at an increasing rate, mainly in vacuum. These self sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atomic force microscope. Two fundamentally different types of quartz sensors have achieved atomic resolution: the 'needle sensor' that is based on a length extensional resonator and the 'qPlus sensor' that is based on a tuning fork. Here, we calculate and measure the noise characteristics of these sensors. We find four noise sources: deflection detector noise, thermal noise, oscillator noise and thermal drift noise. We calculate the effect of these noise sources as a factor of sensor stiffness, bandwidth and oscillation amplitude. We find that for self sensing quartz sensors, the deflection detector noise is independent of sensor stiffness, while the remaining three noise sources increase strongly with sensor stiffness. Deflection detector noise increases with bandwidth to the power of 1.5, while thermal noise and oscillator noise are proportional to the square root of the bandwidth. Thermal drift noise, however, is inversely proportional to bandwidth. The first three noise sources are inversely proportional to amplitude while thermal drift noise is independent of the amplitude. Thus, we show that the earlier finding that quoted optimal signal-to-noise ratio for oscillation amplitudes similar to the range of the forces is still correct when considering all four frequency noise contributions. Finally, we suggest how the signal-to-noise ratio of the sensors can be further improved and briefly discuss the challenges of mounting tips.

Dynamics of Quartz Tuning Fork Force Sensors Used in Standoff Photoacoustic Detection

A comparsion of force sensors for atomic force microscopy based on quartz tuning forks and length extensional resonators

Characterization of strongly coupled quartz tuning fork sensors for precision force measurement in atomic force microscopy

Calibration of the oscillation amplitude of quartz tuning fork-based force sensors with astigmatic displacement microscopy

Quartz-Enhanced Photoacoustic Spectroscopic Co2 Sensor System Using a Quartz Tuning Fork-Embedded and In-Plane Configuration

Dynamic Behavior of Tuning Fork Shear-Force Structures in a SNOM System

High and flat spectral responsivity of quartz tuning fork used as infrared photodetector in tunable diode laser spectroscopy

Harmonic phase-sensitive detection for quartz-enhanced photoacoustic-thermoelastic spectroscopy

Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy

Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy

Quartz-enhanced photoacoustic spectroscopy sensing using trapezoidal- and round-head quartz tuning forks

Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy.

Research On The Sensing Performance Of The Tuning Fork-Probe As A Micro Interaction Sensor

Force-frequency Relation and Its Nonlinearity of Double-Ended Tuning Fork

Force-distance studies with piezoelectric tuning forks below 4.2 K

First Overtone Frequency Stimulated Quartz Tuning Fork Used For Shear-Force Scanning Near-Field Optical Microscopy

Analysis of the natural frequency of a quartz double-end tuning fork with a new deformation model

Eigenmodes of a quartz tuning fork and their application to photo-induced force microscopy

Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer

Integrated tuning fork nanocavity optomechanical transducers with high $f_{M}Q_{M}$ product and stress-engineered frequency tuning

Improving force sensitivity by amplitude measurement of light reflected from a detuned optomechanical cavity