Humidity Sensing Property of Al-Doped Mesoporous Silica

Wang Chang Geng,Li Bing Duan,Qiu Yu Zhang
DOI: https://doi.org/10.4028/www.scientific.net/amm.249-250.992
2012-01-01
Applied Mechanics and Materials
Abstract:In order to study the humidity sensing property and sensing mechanism of Al-doped mesoporous silica SBA-15 (Al-SBA-15), Al-SBA-15 was prepared by a simple grind method following a heat-treatment process. Its structure and morphology was characterized by X-ray diffraction (XRD), Infrared (IR), scanning electron microscope (SEM). Humidity sensing response was studied and the results indicated that Al-SBA-15 displayed better sensing property when the frequency was 100 Hz. The impedance of Al-SBA-15 changes three orders of magnitude when relative humidity changes from 11% to 95%. Complex impedance spectra, the corresponding equivalent circuit under different relative humidity are carefully analyzed to explore the humidity sensing mechanism of this material. This material can be used as a promising humidity sensing material.
What problem does this paper attempt to address?