Abstract:The machining of ultra-smooth surfaces has always been a significant research topic in the fields of optics fabrication. In this paper, disc hydrodynamic polishing (DHDP) process with a novel polishing tool is proposed to produce ultra-smooth surface with sub-nanometer scale surface roughness (Ra < 1 nm) and undamaged sub-surface. In order to explore the principle of the ultra-smooth surface generation in the DHDP process, the material removal mechanism and evolution mechanism of micro-morphology of polished surface were firstly studied by preliminary experiments. Then, theoretical material removal and surface simulation modeling are established on the basis of computational fluid dynamics (CFD), fractal theory for rough surfaces, particle contact mechanics, and erosion mechanisms in DHDP. Finally, a series of polishing experiments was performed on fused quartz glass to verify the theoretical model, which could be applied to predict surface topography and guide the ultra-smooth surface polishing process. The results indicated that the peak-to-valley (PV) value and waviness of the workpiece were reduced in the nanometer level under the erosion action of abrasive particles. Moreover, the surface roughness Ra and PV values decreased with the increase of rotation speed and polishing time. The analysis of power spectral density (PSD) results illustrates that high rotation speed of tool and polishing time (less than 60 min) can reduce the high-spatial-frequency errors distinctly, and the longer polishing time (above 60 min) can also influence on the mid-spatial-frequency errors.

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