Abstract:Industrial process status can be modified according to continuous operations, which are required by different production specifications. Commonly, in a multimode process, attention was always paid to stable modes, while transitions were neglected. In a transition process, the process may be externally time varying or nonstationary so that the identification and the modelling are intractable to implement using traditional statistical methods. In this article, a transition identification and process monitoring method is proposed to handle the above problems based on a novel dynamic mutual information similarity (DMIS) analysis. Firstly, a multimode process is represented by a series of overlapping moving windows to consider the local information. In order to extract the corresponding dynamic information, each of these windows is modelled using the dynamic partial least squares (DPLS) method. Then, the mutual information algorithm is introduced to calculate the similarity between different latent variables. The hierarchical clustering method is employed to transfer the similarity information into a visualized dendrogram where the whole process, including a transition, is divided into several segments. The statistical characteristics in each segment are relatively stable and can be characterized by conventional multivariate statistical process control methods. Online identification and fault detection are then carried out for the multimode process through a series of DPLS models, established in the offline steps. The feasibility and effectiveness of the proposed method are validated by the Tennessee Eastman (TE) benchmark and a real process. The results of the proposed methods have shown superior performance compared to previous works.

Diffusion maps based k-nearest-neighbor rule technique for semiconductor manufacturing process fault detection

Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

Random projection based k Nearest Neighbor rule for semiconductor process fault detection

A Novel Fault Detection Method for Semiconductor Manufacturing Processes

Fault Detection and Isolation of Non-Gaussian and Nonlinear Processes Based on Statistics Pattern Analysis and the K-Nearest Neighbor Method

Fault Isolation Based on K-Nearest Neighbor Rule for Industrial Processes

Statistical Process Monitoring Based on the Kernel Mean Discrepancy Test

Convolutional Neural Networks for Multi-Stage Semiconductor Processes

kNN based on probability density for fault detection in multimodal processes

Data-based fault-tolerant control of the semiconductor manufacturing process based on K-nearest neighbor nonparametric regression

Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment

A Data-Driven Fault Detection Framework Using Mahalanobis Distance Based Dynamic Time Warping

A novel fault diagnosis system using pattern classification on kernel FDA subspace

A Sparse Dimensionality Reduction Approach Based on False Nearest Neighbors for Nonlinear Fault Detection

Semiconductor Manufacturing Process Monitoring Using Gaussian Mixture Model and Bayesian Method with Local and Nonlocal Information

Dynamic Mutual Information Similarity Based Transient Process Identification and Fault Detection

Fault Detection Using Principal Components-Based Gaussian Mixture Model for Semiconductor Manufacturing Processes

Semisupervised Kernel Learning for Fda Model and Its Application for Fault Classification in Industrial Processes

Unsupervised fault detection for multimode processes using distance space statistics analysis

Fault Detection and Diagnosis Via Standardized K Nearest Neighbor for Multimode Process

Multi-Stage Process Diagnosis Networks in Semiconductor Manufacturing