Abstract:Abstract Recently, k ‐nearest neighbor rules (kNN) have drawn increasing attention for fault detection of multimodal industrial processes. However, the traditional kNN method performs poorly for weak faults in a dense mode when the dispersion degree of each mode is quite different. The reason is that the kNN statistics of weak faults are usually submerged by those of normal data in a mode with a high dispersion degree. To improve the fault detection performance of kNN in this case, this paper proposes a new multimodal fault detection method of kNN based on probability density. The proposed method does not need to consider the different degrees of dispersion between modes and avoids the problem of weak faults in a mode that has a low dispersion degree that is submerged by normal data in a mode with a high dispersion degree. A multimodal numerical example with different dispersion degrees of each mode and an industrial application in a semiconductor manufacturing process are used to verify the effectiveness of the proposed method. The simulation results demonstrate that the proposed method shows better fault detection performance than the kNN, local outlier factor, and weighted difference principal component analysis methods. The kNN method performs poorly for weak faults in a dense mode when the dispersion degree of modes is different. To solve this problem, the paper proposes a multimodal fault detection method of kNN based on probability density (PD‐kNN). Use probability density (PD) to determine which mode test data belongs to. Detect the data by using established kNN model based on the training data of corresponding mode. Proposed method does not need to consider different degrees of dispersion between modes.

Random projection based k Nearest Neighbor rule for semiconductor process fault detection

Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

Fault Isolation Based on K-Nearest Neighbor Rule for Industrial Processes

Fault Detection and Isolation of Non-Gaussian and Nonlinear Processes Based on Statistics Pattern Analysis and the K-Nearest Neighbor Method

Diffusion maps based k-nearest-neighbor rule technique for semiconductor manufacturing process fault detection

Statistical Process Monitoring Based on the Kernel Mean Discrepancy Test

Combining Kernel Principal Component Analysis and Spatial Group-Wise Enhance Convolutional Neural Network for Fault Recognition of Rolling Element Bearings

Fault diagnosis in industrial processes using principal component analysis and hidden Markov model

Kernel Generalization of Multi-Rate Probabilistic Principal Component Analysis for Fault Detection in Nonlinear Process

Adaptive Partitioning Pca Model for Improving Fault Detection and Isolation

Fault detection method based on kernel principal angle

Sensor Fault Diagnosis of Nonlinear Processes Based on Structured Kernel Principal Component Analysis

A novel fault diagnosis system using pattern classification on kernel FDA subspace

kNN based on probability density for fault detection in multimodal processes

New KPCA Based Fault Detection Algorithm Integrating FDA-PCMC Based Sample Classification

Fault Variables Recognition Using Improved K-Nearest Neighbor Reconstruction

A Sparse Dimensionality Reduction Approach Based on False Nearest Neighbors for Nonlinear Fault Detection

Accelerated Kernel Canonical Correlation Analysis with Fault Relevance for Nonlinear Process Fault Isolation

Semisupervised Kernel Learning for Fda Model and Its Application for Fault Classification in Industrial Processes

Multiway Principal Polynomial Analysis for Semiconductor Manufacturing Process Fault Detection

Nonlocal Structure Constrained Neighborhood Preserving Embedding Model and Its Application for Fault Detection