Chemical Vapor Deposition of Large‐Sized Hexagonal WSe2 Crystals on Dielectric Substrates

Jianyi Chen,Bo Liu,Yanpeng Liu,Wei Tang,Chang Tai Nai,Linjun Li,Jian Zheng,Libo Gao,Yi Zheng,Hyun Suk Shin,Hu Young Jeong,Kian Ping Loh
DOI: https://doi.org/10.1002/adma.201503446
IF: 29.4
2015-01-01
Advanced Materials
Abstract:High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V(-1) s(-1) and a photoresponsivity of ≈1100 mA W(-1), which is comparable to that of exfoliated flakes.
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