Optical Properties of Nb2O5-SiO2 Composite Films Fabricated by RAS (radical Assisted Sputtering) Coater and Application to Optical Thin Films

Yousong JIANG,Yizhou SONG,Takesi SAKURAI,Ming LI,Haiqian WANG
DOI: https://doi.org/10.2978/jsas.16.1
2004-01-01
Journal of Advanced Science
Abstract:Composite films of Nb2O5-SiO2 have been deposited at room temperature using RAS (radical assisted sputtering) coater. The results of XRD and cross section SEM observation showed these composite films are all amorphous. The refractive index of the composite films can be adjusted from 1.60 to 2.10 with repeatability of better than 1% by controlling sputter power of Nb and Si cathodes separately. By using intermediate refractive index films, we can fabricate the optical multilayer film with superior optical performance.
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