Abstract:This paper discusses the pulse signal of a highly sensitive lateral deformable optical microelectromechanical systems (MEMS) displacement sensor based on Wood's anomalies and its corresponding tolerance. The optical reflection amplitude of the device changes with the displacement of the nanostructured grating elements. Unexpectedly, the device's original sinusoidal signal develops into a new signal form (i.e., a pulse signal), when the air gap between the two layers of gratings decreases. Since the slope of the pulse signal, namely 2.5%/nm (i.e., 0.65 dB/nm), is eight times higher than that of the original signal form, namely 0.3%/ nm (i.e., 0.03 dB/nm), the sensitivity of the structure improves by eight times. However, this device is very sensitive to parameters such as its wavelength, period, duty ratio, and air gap. In this paper we used rigorous coupled wavelength analysis (RCWA) to analyze and optimize the respective influence of each parameter on the device's performance. We have introduced two methods to search for the optimal setting and have demonstrated the optimal settings of different incident lights. The simulation results indicate that it is close to 85% possible to achieve an actual device with the highest slope superior to 0.5%/nm and it is 64% possible that the highest slope of an actual device falls in the interval ranging from 1.0%/nm to 2.0%/nm. All the simulated data helped us better understand the tolerance of the pulse signal and guide us toward the development of an actual device. (C) 2015 Optical Society of America

Study of a High-Precision SAW-MOEMS Strain Sensor with Laser Optics

Highly Sensitive Lateral Deformable Optical MEMS Displacement Sensor: Anomalous Diffraction Studied by Rigorous Coupled-Wave Analysis.

Highly Sensitive and Fast Response Strain Sensor Based on Evanescently Coupled Micro/nanofibers

An Optoelectronic Oscillator‐based Strain Sensor with Extended Measurement Range

Design of SAW Sensor for Longitudinal Strain Measurement with Improved Sensitivity

Large detection range and high strain sensitivity fiber SPR sensor based on wave structure

Highly Sensitive Strain Sensor Based on a Sealed Optical Microfiber Coupler

Highly Sensitive Surface Acoustic Wave Flexible Strain Sensor

Polarimetric Multilongitudinal‐mode Distributed Bragg Reflector Fiber Laser Sensor for Strain Measurement

Flexible Dual-Mode Surface Acoustic Wave Strain Sensor Based on Crystalline LiNbO3 Thin Film

Photonic crystal fiber strain sensor based on multimode/air spherical cavity structure

Ultrasensitive Strain Sensor Based on Mach-Zehnder Interferometer with Bent Structures

Flexible Surface Acoustic Wave Broadband Strain Sensors Based on Ultra-Thin Flexible Glass Substrate

Intensity-Modulated Strain Sensor Based on Fiber In-Line Mach–Zehnder Interferometer

Coupled Optoelectronic Oscillator Based Strain Sensor with Extended Measurement Range

Novel Surface Acoustic Wave Temperature-Strain Sensor Based on LiNbO3 for Structural Health Monitoring

Photoelectric dual-mode strain sensing based on piezoelectric effect

High-precision Thermal-Insensitive Strain Sensor Based on Optoelectronic Oscillator

Optical Fiber Strain Sensor with High Precision and Extended Dynamic Range Based on a Coupled Optoelectronic Oscillator.

Development of Flexible ZnO Thin Film Surface Acoustic Wave Strain Sensors on Ultrathin Glass Substrates

A Static Axial Strain Fiber Ring Cavity Laser Sensor Based on Multi-Modal Interference