Small diameter microchannel of PDMS and complex three-dimensional microchannel network

gang li,shengyong xu

DOI: https://doi.org/10.1016/j.matdes.2015.05.012

IF: 9.417

2015-01-01

Materials & Design

Abstract:Schematic fabrication procedures for complex 3D micro-channel structures.

What problem does this paper attempt to address?

Micro Etching Method Inside Microchannels

Yi Zheng,Haibo Xie,Xin Fu,Huayong Yang

2009-01-01

Abstract:Microfluidic devices basically operate at low Reynolds numbers, which leads entirely laminar features Of the fluid in microchannels. This paper presents a novel micro fabrication method based on the laminar characteristics of microscale flow. This new micro fabrication process can be used for high aspect ratio etching inside a micro channel on isotropic Substrate materials and the features of the micro structures, which are patterned with this fabrication method, are determined by the flow parameters. A new kind of Glass-PDMS microfluidic chip with an impermanent bonding is used for the convenience of observing and measurement. The effects of flowrates on etching rate and the micro topography were analyzed. The quantitative conclusion described in this letter, is required for understanding the features Of Surface chemical reaction inside microchannels.
Fabrication of Topologically Complex Three-Dimensional Microfluidic Systems in PDMS by Rapid Prototyping

Janelle R. Anderson,Daniel T. Chiu,Rebecca J. Jackman,Oksana Cherniavskaya,J. Cooper McDonald,Hongkai Wu,Sue H. Whitesides,George M. Whitesides

DOI: https://doi.org/10.1021/ac9912294

IF: 7.4

2000-06-09

Analytical Chemistry

Abstract:This paper describes a procedure for making topologically complex three-dimensional microfluidic channel systems in poly(dimethylsiloxane) (PDMS). This procedure is called the "membrane sandwich" method to suggest the structure of the final system: a thin membrane having channel structures molded on each face (and with connections between the faces) sandwiched between two thicker, flat slabs that provide structural support. Two "masters" are fabricated by rapid prototyping using two-level photolithography and replica molding. They are aligned face to face, under pressure, with PDMS prepolymer between them. The PDMS is cured thermally. The masters have complementary alignment tracks, so registration is straightforward. The resulting, thin PDMS membrane can be transferred and sealed to another membrane or slab of PDMS by a sequence of steps in which the two masters are removed one at a time; these steps take place without distortion of the features. This method can fabricate a membrane containing a channel that crosses over and under itself, but does not intersect itself and, therefore, can be fabricated in the form of any knot. It follows that this method can generate topologically complex microfluidic systems; this capability is demonstrated by the fabrication of a "basketweave" structure. By filling the channels and removing the membrane, complex microstructures can be made. Stacking and sealing more than one membrane allows even more complicated geometries than are possible in one membrane. A square coiled channel that surrounds, but does not connect to, a straight channel illustrates this type of complexity.
A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Mengying Zhang,Jinbo Wu,Limu Wang,Kang Xiao,Weijia Wen

DOI: https://doi.org/10.1039/b923101c

IF: 7.517

2010-01-01

Lab on a Chip

Abstract:We report a simple methodology to fabricate PDMS multi-layer microfluidic chips. A PDMS slab was surface-treated by trichloro (1H,1H,2H,2H-perfluorooctyl) silane, and acts as a reusable transferring layer. Uniformity of the thickness of the patterned PDMS layer and the well-alignment could be achieved due to the transparency and proper flexibility of this transferring layer. Surface treatment results are confirmed by XPS and contact angle testing, while bonding forces between different layers were measured for better understanding of the transferring process. We have also designed and fabricated a few simple types of 3D PDMS chip, especially one consisting of 6 thin layers (each with thickness of 50 mum), to demonstrate the potential utilization of this technique. 3D fluorescence images were taken by a confocal microscope to illustrate the spatial characters of essential parts. This fabrication method is confirmed to be fast, simple, repeatable, low cost and possible to be mechanized for mass production.

chemistry, analytical,nanoscience & nanotechnology,biochemical research methods,instruments & instrumentation, multidisciplinary
Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips

Ho Nam Chan,Yangfan Chen,Yiwei Shu,Yin Chen,Qian Tian,Hongkai Wu

DOI: https://doi.org/10.1007/s10404-014-1542-4

2015-01-10

Microfluidics and Nanofluidics

Abstract:AbstractIn this work, we developed a convenient, one-step soft-lithographic-based molding technique for molding truly 3D microfluidic channels in polydimethylsiloxane (PDMS) by overcoming two grand challenges. We optimized the post-treatment conditions for 3D-printed resin structures to facilitate the use of them as masters for PDMS replica molding. What is more important, we demonstrated a novel method for single-step molding from 3D-printed microstructures to generate truly 3D microfluidic networks easily. With this technique, we fabricated some key, functional 3D microfluidic structures and components including a basket-weaving network, a 3D chaotic advective mixer and microfluidic peristaltic valves. Furthermore, an interesting “injection-on-demand” microfluidic device was also demonstrated. Our technique offers a simple, fast route to the fabrication of 3D microfluidic chips in a short time without clean-room facilities.

physics, fluids & plasmas,nanoscience & nanotechnology,instruments & instrumentation
Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

Yu Hongbin,Zhou Guangya,Chau Fook Siong,Wang Shouhua,Lee Feiwen

DOI: https://doi.org/10.1016/j.snb.2008.11.035

2009-04-02

Abstract:A novel method is presented for fabricating PDMS-based microchannel. The mold consists of a tunable PDMS structure rather than the commonly used SU-8 mold with fixed shape. This structure is prepared by transferring the desired microchannel pattern into one PDMS substrate via soft lithography and bonding it to a spin-coated PDMS membrane with the oxygen plasma activated technology. Through applying proper pressure to this structure and keeping it constant during the whole molding process, the resulted membrane deformation shape with rounded cross-sectional contour is totally replicated into the device layer, constituting the final main body of the microchannel. Besides the inherent feature of rounded cross-section provided by this method, the depth of the microchannel can be easily controlled by changing the pressure. At the same time, through designing different widths at different positions in one microchannel, it is straightforward to realize microchannel structure with multi-depth in one step using one photomask. Both of these characteristics have been successfully demonstrated in our experiments and it will definitely find wide applications in lab-on-a-chip area.
Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Leyan Wang,Dongxian Zhang,Zhenghu Wen,Haijun Zhang

DOI: https://doi.org/10.1002/jemt.20722

2009-01-01

Microscopy Research and Technique

Abstract:This article reports a novel laser-induced micro-fabrication method and its monitoring system for three-dimensional (3D) microstructures. The mechanism of the method is that a small zone of thermoplastic material melted by laser heating grows in liquid surrounding environment, solidifying into a convex microstructure, such as micro-dot or micro-pillar. A laser diode (808 nm) with maximum power output of 130 mW is used as power source, and a kind of paraffin mixed with stearic acid and paint serves as the thermoplastic material for 3D microstructure formation experiments. A light microscope system consisting of a charge-coupled device (CCD) and a computer is utilized to realize real-time observation of the micro-fabricating process. The distribution of local temperature rise on material surface created by laser irradiation is simulated. The effects of liquid environment on microstructure formation have been theoretically analyzed and experimentally studied. Experiments are further carried out to investigate the relationship between laser spot and fabricated microstructures. The results indicate that the widths of microdots or micro-pillars are mostly determined by the size of focal spot, and their heights increase with the enlargement of laser power density. With this method, a micro-dot array of Chinese characters meaning "China" has been successfully fabricated through computer programming. This method has the advantages of implementing direct, mask-less, real-time and inexpensive 3D microstructure fabrication. Therefore, it would be widely applied in the fields of micro/nano-technology for practical fabrication of different kinds of 3D microstructures. Microsc. Res. Tech. 72:717-722, 2009. (C) 2009 Wiley-Liss, Inc.
Multiscale fabrication of scalable biomimetic 3-D, integrated micro-nanochannels network in PDMS for solute exchange

Prasoon Kumar,Prasanna S Gandhi,Mainak Majumder

DOI: https://doi.org/10.48550/arXiv.1704.02108

2017-04-07

Materials Science

Abstract:Integrated micro-nanochannel networks in fluidic devices are desirable in a number of applications ranging from self-healing/cooling materials to bioengineering. The conventional micro-manufacturing techniques are capable of either producing microchannel or nanochannel networks for a fluidic application but lack proficiency in the production of an integrated micro-nanochannel network with a smooth transition from micro-to-nano scale dimension. In addition, these techniques possess limitations such as heavy initial investment, sophistication in operation and scale-up capabilities. Therefore, the current paper demonstrates the combination of micro/nanotechnologies to design and develop a biomimetic 3-D integrated micro-nanochannel network in PDMS device for solute exchange. We have used 3-D printer, a scalable technology, to design and manufacture micro-mold having fractal-shaped features. Further, electrospinning was used to deposit nanofibrous network on the fractal mold. Subsequent micro-molding with PDMS was used to obtain fractal-shaped microchannels integrated with embedded nanofibers. Henceforth, solvent etching of nanofibers followed by bonding of thin PDMS membrane generated by spin coating to open end of channels leads to the formation of functional microdevices. These PDMS devices mimic the natural vasculature of a living system, where fractal-shaped microchannels will assist in efficient fluid flow and the site of nanovascular network participates in heat/mass transport operations. Further, dye flow propounds the functionality of such devices. Our study hence proposes a simple and scalable hybrid microtechnolgy to fabricate fluidic devices having multiscale architecture. This will also facilitate the rapid fabrication of microfluidic devices for biomedical, diagnostics, sensors and micro-TAS applications.
Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Jingjiang Qiu,Qing Gao,Haiming Zhao,Jianzhong Fu,Yong He

DOI: https://doi.org/10.1021/acsbiomaterials.7b00401

2017-01-01

ACS Biomaterials Science & Engineering

Abstract:In recent years, 3D integrated microfluidic systems have become increasingly more popular because of their ability to incorporate multifunctional components, including porous membranes and biological scaffolds. Because of limitations in resolution, fabrication efficiency and materials, it is hard to develop complex integrated microfluidic systems with low cost and high efficiency. In this paper, we present a novel method that utilizes modular structure-based design, which could greatly reduce the time and cost for customization of complete integrated chips, compared to traditional techniques. By printing sacrificial patterns on the substrate using the 3D printing approach and subsequently covering them with PDMS prepolymer, PDMS slices with modular structures were obtained, each with specific functions. By combining different PDMS slices with specific modular structures and other functional components, such as membranes and scaffolds, the conceptual design was efficiently converted into complete integrated microfluidic chips. As proof-of-concept, customized 3D microfluidic chips were generated and successfully used for cell culture and biological analysis. Furthermore, the flexible combination with biofabrication of hydrogel beads was also presented, revealing the potential use of this technique in the fabrication of organ-on-a-chip.
Self-shrinking soft demoulding for complex high-aspect-ratio microchannels

Dongliang Fan,Xi Yuan,Wenyu Wu,Renjie Zhu,Xin Yang,Yuxuan Liao,Yunteng Ma,Chufan Xiao,Cheng Chen,Changyue Liu,Hongqiang Wang,Peiwu Qin

DOI: https://doi.org/10.1038/s41467-022-32859-z

IF: 16.6

2022-08-29

Nature Communications

Abstract:Abstract Microchannels are the essential elements in animals, plants, and various artificial devices such as soft robotics, wearable sensors, and organs-on-a-chip. However, three-dimensional (3D) microchannels with complex geometry and a high aspect ratio remain challenging to generate by conventional methods such as soft lithography, template dissolution, and matrix swollen processes, although they are widespread in nature. Here, we propose a simple and solvent-free fabrication method capable of producing monolithic microchannels with complex 3D structures, long length, and small diameter. A soft template and a peeling-dominant template removal process are introduced to the demoulding process, which is referred to as soft demoulding here. In combination with thermal drawing technology, microchannels with a small diameter (10 μm), a high aspect ratio (6000, length-to-diameter), and intricate 3D geometries are generated. We demonstrate the vast applicability and significant impact of this technology in multiple scenarios, including soft robotics, wearable sensors, soft antennas, and artificial vessels.

multidisciplinary sciences
Fabrication of fillable microparticles and other complex 3D microstructures

Kevin J McHugh,Thanh D Nguyen,Allison R Linehan,David Yang,Adam M Behrens,Sviatlana Rose,Zachary L Tochka,Stephany Y Tzeng,James J Norman,Aaron C Anselmo,Xian Xu,Stephanie Tomasic,Matthew A Taylor,Jennifer Lu,Rohiverth Guarecuco,Robert Langer,Ana Jaklenec,Kevin J. McHugh,Thanh D. Nguyen,Allison R. Linehan,Adam M. Behrens,Zachary L. Tochka,Stephany Y. Tzeng,James J. Norman,Aaron C. Anselmo,Matthew A. Taylor

DOI: https://doi.org/10.1126/science.aaf7447

IF: 56.9

2017-09-15

Science

Abstract:Technology used for computer chip manufacturing is combined with soft lithography to produce small polymeric structures.

multidisciplinary sciences
Fabrication and Demonstration of a 3D-printing/PDMS Integrated Microfluidic Device

Jeonghyeon Cheon,Seunghyun Kim,,

DOI: https://doi.org/10.21926/rpm.2201002

2021-10-21

Recent Progress in Materials

Abstract:3D printing is an attractive method to fabricate microfluidic devices due to (1) its fast and simple process without specialized equipment and cleanroom environment, and (2) its capability to create complex 3D structures. Combined with Polydimethylsiloxane (PDMS), it can be used to develop various microfluidic devices taking advantage of both 3D printing and PDMS. In this paper, we investigated a Digital Light Processing (DLP) 3D printer to fabricate 3D printing/PDMS integrated microfluidic devices. We used it to fabricate both a master mold for the PDMS process and a substrate containing pneumatic ports and channels. The optimal design parameters to print a symmetrical microchannel structure were determined. We also measured the printing accuracy of taper structures as an example of its capability to fabricate complex structures. Then, we fabricated a microfluidic device by integrating a PDMS component with a 3D printed substrate. The microfluidic device operation was demonstrated using dye solutions. The fluidic control results clearly show the microfluidic device works as expected.
Facile Fabrication of Helical Microfluidic Channel Based on Rope Coiling Effect

Wei-min Yang,Tang-kui Zhu,Yu-an Jin,Jian-zhong Fu

DOI: https://doi.org/10.1007/s00542-016-3010-4

2016-01-01

Microsystem Technologies

Abstract:A rapid and simple fabrication approach to achieve helical microfluidic channels with circular cross section using template-assisted method is proposed in this article based on rope coiling effect in the extrusion process of a desktop 3D printer. Rope coil effect is a common phenomenon in the falling process of a slender string of viscous fluid and is used to fabricate helical microstructures served as the templates in the sacrificial template-assisted method, which holds great promise to fabricate micro-channels with desired vascular architectures. The helical microstructures are fabricated with the high viscous PVA (Polyvinyl alcohol) paste extruded out of the nozzle orifice from a certain falling height. After the PDMS block embedded with PVA helical template has been fabricated, the template would then be removed by melting in hot water easily to obtain the microfluidic channels. Two major processing parameters, falling height and flow rate are studied in relation to two main geometric features of helical structures: coil diameter and wire diameter. Besides, the dimension and the shape of helical microstructures are further studied for fabrication of microfluidic channels with varying geometric parameters. The presented method facilitates the rapid and convenient construction of three-dimensional (3D) helical microfluidic channels for a wide variety of lab-on-chip applications.
Morphology Control of Microchannel Cross-Section Using Sacrificial Spinning Fiber

Yangxi Zhang,Huize Jing,Kaisi Xu,Chencheng Gao,Yilong Hao,Fanrui Meng,Yiming Gui,Guoxing Chen

DOI: https://doi.org/10.1109/memsys.2017.7863659

2017-01-01

Abstract:This paper presents a novel method to manufacture specific cross-section microchannel by spinning profiled fiber. With spinning process, High Impact Polystyrene (HIPS) fibers with high profile degree can be drawn from a shaped spinneret orifice, and those fibers act as sacrificial mold to build microchannel with specific cross-section in PDMS. Microchannels with various shapes, from 55μm diameter circular to 220μm length square, from Y-shape, V-shape, L-shape to C-shape cross-section were both fabricated by the spinning-casting method. A PDMS swelling process has also been developed to remove large length-diameter ratio HIPS fiber (up to 1000:1) inside cured PDMS rapidly without mechanical extraction, it can also be used for rapid machining of complex three dimensional microchannels. This simple and mass productive method can improve specific surface area of microchannel, and provide various possibilities in microchannel design and fabrication.
Fabrication of sharp-edged 3D microparticles via folded PDMS microfluidic channels

Chenchen Zhou,Shuaishuai Liang,Yongjian Li,Haosheng Chen,Jiang Li

DOI: https://doi.org/10.1039/d1lc00807b

IF: 7.517

2022-01-01

Lab on a Chip

Abstract:3D microparticles have promising applications in self-assembly, biomedical engineering, mechanical engineering, etc.

chemistry, analytical,nanoscience & nanotechnology,biochemical research methods,instruments & instrumentation, multidisciplinary
Fabrication and Functionalization of 3D Printed Polydimethylsiloxane‐Based Microfluidic Devices Obtained through Digital Light Processing

Gustavo Gonzalez,Annalisa Chiappone,Kurt Dietliker,Candido Fabrizio Pirri,Ignazio Roppolo

DOI: https://doi.org/10.1002/admt.202000374

IF: 6.8

2020-07-29

Advanced Materials Technologies

Abstract:<p>This work reports the preparation and 3D printing of a custom‐made photopolymer based on acrylate‐polydimethylsiloxane (PDMS), for the fabrication of complex‐shaped 3D printed microfluidic chips. By selecting and combining the proper materials during the preparation of the resins along with the freedom of design of light‐based 3D printers, 3D microfluidic PDMS‐like chips are obtained with excellent optical features, high chemical stability, and good mechanical properties. Furthermore, taking advantage of unreacted functional groups exposed on the sample's surface after the 3D printing step, the surface properties of the devices are easily and selectively modified during the postcuring step through UV‐induced grafting polymerization techniques, giving an added value to the printed devices in terms of surface treatment compared to conventional methods. The 3D printing of the PDMS‐based resins developed here may potentially transforms the fabrication methodology of PDMS microfluidic devices by decreasing manufacturing costs and time, allowing the production of complex‐shaped and truly 3D microdevices.</p>

materials science, multidisciplinary
Route to one-step microstructure mold fabrication for PDMS microfluidic chip

Xiaoqing Lv,Zhaoxin Geng,Zhiyuan Fan,Shicai Wang,Yue Su,Weihao Fang,Weihua Pei,Hongda Chen

DOI: https://doi.org/10.1063/1.5023823

IF: 1.697

2018-04-01

AIP Advances

Abstract:The microstructure mold fabrication for PDMS microfluidic chip remains complex and time-consuming process requiring special equipment and protocols: photolithography and etching. Thus, a rapid and cost-effective method is highly needed. Comparing with the traditional microfluidic chip fabricating process based on the micro-electromechanical system (MEMS), this method is simple and easy to implement, and the whole fabrication process only requires 1-2 h. Different size of microstructure from 100 to 1000 μm was fabricated, and used to culture four kinds of breast cancer cell lines. Cell viability and morphology was assessed when they were cultured in the micro straight channels, micro square holes and the bonding PDMS-glass microfluidic chip. The experimental results indicate that the microfluidic chip is good and meet the experimental requirements. This method can greatly reduce the process time and cost of the microfluidic chip, and provide a simple and effective way for the structure design and in the field of biological microfabrications and microfluidic chips.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
The Performance and Fabrication of 3D Variable Cross-Section Channel for Passive Microfluidic Control

Wenjie Qian,Zhou Zhou,Qing Wang,Wei Shi,Manman Xu,Daoheng Sun

DOI: https://doi.org/10.3390/mi15081038

2024-08-15

Abstract:Passive fluid control has mostly been used for valves, pumps, and mixers in microfluidic systems. The basic principle is to generate localized losses in special channel structures, such as branches, grooves, or spirals. The flow field in two-dimensional space can be easily calculated using the typical Stokes formula, but it is challenging in three-dimensional space. Moreover, the flow field with periodic variable cross-sections channeled of polyhedral units has been neglected in this research field due to previous limitations in manufacturing technology. With the continuous progress of 3D printing technology, the field of microfluidic devices ushered in a new era of manufacturing three-dimensional irregular channels. In this study, we present finite analysis results for a periodic nodular-like channel. The experiments involve variations in the Reynold number (Re), periodic frequency, and comparative analyses with conventional structures. The findings indicate that this variable 3D cross-section structure can readily achieve performance comparable to other passive fluid control methods in valve applications. A 3D model of the periodic tetrahedron channel was fabricated using 3D printing to validate these conclusions. This research has the potential to significantly enhance the performance of passive fluid control units that have long been constrained by manufacturing dimensions.
Self-Sealed Bionic Long Microchannels with Thin Walls and Designable Nanoholes Prepared by Line-Contact Capillary-Force Assembly

Zhao-Xin Lao,Yan-Lei Hu,Deng Pan,Ren-Yan Wang,Chen-Chu Zhang,Jin-Cheng Ni,Bing Xu,Jia-Wen Li,Dong Wu,Jia-Ru Chu

DOI: https://doi.org/10.1002/smll.201603957

IF: 13.3

2017-01-01

Small

Abstract:Long microchannels with thin walls, small width, and nanoholes or irregular shaped microgaps, which are similar to capillaries or cancerous vessels, are urgently needed to simulate the physiological activities in human body. However, the fabrication of such channels remains challenging. Here, microchannels with designable holes are manufactured by combining laser printing with line-contact capillary-force assembly. Two microwalls are first printed by femtosecond laser direct-writing, and subsequently driven to collapse into a channel by the capillary force that arises in the evaporation of developer. The channel can remain stable in solvent due to the enhanced Van der Waals' force caused by the line-contact of microwalls. Microchannels with controllable nanoholes and almost arbitrary patterns can be fabricated without any bonding or multistep processes. As-prepared microchannels, with wall thicknesses less than 1 µm, widths less than 3 µm, lengths more than 1 mm, are comparable with human capillaries. In addition, the prepared channels also exhibit the ability to steer the flow of liquid without any external pump.
Fabrication of PDMS microfluidic devices using nanoclay-reinforced Pluronic F-127 as a sacrificial ink

Kui Zhou,Madhuri Dey,Bugra Ayan,Zhifeng Zhang,Veli Ozbolat,Myoung Hwan Kim,Vladimir Khristov,Ibrahim T Ozbolat

DOI: https://doi.org/10.1088/1748-605X/abe55e

2021-04-01

Biomedical Materials (Bristol)

Abstract:Additive manufacturing or three-dimensional (3D) printing technology is increasingly being employed in biochemical as well as clinical applications and more importantly in fabrication of microfluidic devices. However, the microfluidic community mainly relies on photolithography for fabrication of a defined mask, which is both tedious and expensive requiring clean room settings as well as limited to the generation of two-dimensional features. In this work, we 3D printed nanoclay-reinforced Pluronic ink as a sacrificial material, which exhibited shear thinning behavior and superior printability allowing the fabrication of unsupported or overhanging templates of channels with uniform diameter and circular cross-sections. To highlight the potential and effectiveness of the presented approach, we fabricated a human blood vessel-on-a-chip model with curved as well as straight channels. These channels were then lined up with human umbilical vein endothelial cells (HUVECs) and subjected to a dynamic culture for 10 d to explore the effect of shear stress on HUVEC morphology based on the location of HUVECs in the devices. Overall, we presented a highly affordable, practical and useful approach in manufacturing of polydimethylsiloxane-based devices with closed microfluidic channels, which holds great potential for a numerous applications, such as but not limited to organ-on-a-chip, microfluidics, point-of-care devices and drug screening platforms.
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Ran Zhang,Da Huang,Yuanyi Fan,Xiao Liu,Ze Liu,Jinkui Chu

DOI: https://doi.org/10.1088/1361-6439/ac0ff7

2021-07-13

Journal of Micromechanics and Microengineering

Abstract:In order to achieve high-efficiency and high-precision fabrication of nanochannels in micro/nano-fluidic devices, a new method for integrating nano-imprint lithography manufacturing nano-channels and polydimethylsiloxane (PDMS) microchannels with silicon nitride as a bonding layer is proposed. Nanoimprint technology has the advantages of high-precision replication of the template nano-groove size and the ability to form a large number of channels at one time. By depositing silicon nitride on the surface of the nano-trench to improve its bonding force with PDMS treated with oxygen plasma, the bonding strength can withstand pressures above 0.3 MPa. The accuracy of making nanochannels with a characteristic size of 100 nm in this solution can reach more than 95%. Fluorescence experiments using this device show that the device has better enrichment capacity, and its mechanism can be explained by the size exclusion enrichment effect.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

Small diameter microchannel of PDMS and complex three-dimensional microchannel network

Micro Etching Method Inside Microchannels

Fabrication of Topologically Complex Three-Dimensional Microfluidic Systems in PDMS by Rapid Prototyping

A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips

Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Multiscale fabrication of scalable biomimetic 3-D, integrated micro-nanochannels network in PDMS for solute exchange

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Self-shrinking soft demoulding for complex high-aspect-ratio microchannels

Fabrication of fillable microparticles and other complex 3D microstructures

Fabrication and Demonstration of a 3D-printing/PDMS Integrated Microfluidic Device

Facile Fabrication of Helical Microfluidic Channel Based on Rope Coiling Effect

Morphology Control of Microchannel Cross-Section Using Sacrificial Spinning Fiber

Fabrication of sharp-edged 3D microparticles via folded PDMS microfluidic channels

Fabrication and Functionalization of 3D Printed Polydimethylsiloxane‐Based Microfluidic Devices Obtained through Digital Light Processing

Route to one-step microstructure mold fabrication for PDMS microfluidic chip

The Performance and Fabrication of 3D Variable Cross-Section Channel for Passive Microfluidic Control

Self-Sealed Bionic Long Microchannels with Thin Walls and Designable Nanoholes Prepared by Line-Contact Capillary-Force Assembly

Fabrication of PDMS microfluidic devices using nanoclay-reinforced Pluronic F-127 as a sacrificial ink

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding