Piezoelectric micropump using dual-frequency drive

qiao sheng pan,liang guo he,fang sheng huang,xue yan wang,zhi hua feng
DOI: https://doi.org/10.1016/j.sna.2015.03.029
2015-01-01
Abstract:•A piezoelectric micropump using dual-frequency drive is proposed.•A dual-frequency vibrator is designed by using the two modifying methods we studied.•A prototype piezoelectric micropump is designed, fabricated and tested.•Performances of prototype micropump driven by different waves are compared.•The performances of dual-frequency drive micropump are over 155% improved.
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