Performance of a Double-Chamber Serial Piezoelectric Micropump

阚君武,杨志刚,刘品宽,程光明
DOI: https://doi.org/10.3321/j.issn:0367-6234.2004.10.020
2004-01-01
Abstract:A double-chamber piezoelectric micropump with three membrane valves is introduced. A prototype double-chamber serial micropump, measuring 38×3.5 mm, is fabricated with the PZT membrane of 0.18mm in thick and diameter of 30mm. The pump is tested with water as the working solution. The testing results show that both the flowrate and backup pressure of two-chamber micropump are about two times of that of single chamber micropump at the same working voltages and frequency, which accord with the theoretical analysis. The maximum flowrate achieved is up to 11.75 ml/min at the applied voltage of 70 V with frequency of 50 Hz, and the maximum backpressure obtained is about 21.9 kPa at voltage of 70 V with frequency of 20 Hz.
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