Ultra-precision Nano-Structure Fabrication by Amplitude Control Sculpturing Method in Elliptical Vibration Cutting

Jianguo Zhang,Norikazu Suzuki,Yilong Wang,Eiji Shamoto
DOI: https://doi.org/10.1016/j.precisioneng.2014.07.009
IF: 3.315
2015-01-01
Precision Engineering
Abstract:This paper studies the nano-structure fabrication on hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this proposed method, machinable part geometry is essentially restricted by vibration conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, a series of analytical and experimental investigations are conducted. Furthermore, by applying the proposed command compensation method, nano-structures with a large ratio of structure height to wave length are machined accurately. The proposed sculpturing method is subsequently applied to the machining of nano-textured grooves and a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method. (C) 2014 Elsevier Inc. All rights reserved.
What problem does this paper attempt to address?