Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices

yongliang tang,zhijie li,jinyi ma,yuanjun guo,yongqing fu,xiaotao zu
DOI: https://doi.org/10.1016/j.snb.2014.04.046
2014-01-01
Abstract:•We demonstrate an ammonia gas sensor based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices.•The ZnO/SiO2 bi-layer nanofilms are prepared by combining a sol–gel process and a spin-coating technique.•The ZnO/SiO2 bi-layer nanofilms inherit the porous structure of SiO2 film.•The gas sensing property of ZnO/SiO2 nanofilm is dependent on its sheet conductivity value.•The sensor exhibits the ability to detect ammonia gas in a concentration as low as 5ppm, and shows an excellent reproducibility and stability.
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