Mn-doped Zinc Oxide Nanopowders for Humidity Sensors

Xiaoyan Peng,Jin Chu,Boqian Yang,Peter X. Feng
DOI: https://doi.org/10.1016/j.snb.2012.07.011
IF: 9.221
2012-01-01
Sensors and Actuators B Chemical
Abstract:Mn-doped ZnO nanopowders have been prepared by the sol–gel technique using zinc and manganese (II) acetates as precursors. The as-prepared nanopowders were characterized by scanning electron microscopy and Micro-Raman spectroscopy. Humidity sensors based on ZnO nanopowders with different Mn concentrations of 0, 1, 3 and 6at% were fabricated. Linear behavior of the I–V curves at various relative humidity (RH) indicates the ohmic contact between the sensing material and gold electrodes. Sensing characterization reveals that the 6at% Mn-doped ZnO nanopowders have linear response to RH over the range of 11–95%, which offers higher sensitivity than the commonly reported exponential response. The response and recovery time of the sensor are 6s and 20s, respectively, versus the changes of RH from 20% to 80%. The sensors with high reproducibility and stability, as well as high sensitivity throughout a large dynamic range have been obtained.
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