Abstract:The measurement and control of humidity is a major challenge that affects the sensing properties of sensors used in high-precision equipment manufacturing industries. Graphene Oxide(GO)-based materials have been extensively explored in humidity sensing applications because of their high surface area and functional groups. However, there is a lack of effective bulk-manufacturing processes for the synthesis of 2D-based nanocomposites with comb electrodes. Moreover, water intercalation within the layers of 2D materials increases recovery time. This work demonstrates the enhanced sensing characteristics of a capacitive/resistive GO-MnZnO nanocomposite humidity sensor produced using a cost-effective single-pot synthesis process. The in-plane sensing layer consistently improves sensitivity and reduces response time for a wide range of relative humidity measurements (10% to 90%). Interdigitated gold electrodes with varying numbers of fingers and spacing were fabricated using photolithography on a Si/SiO2 for a consistent sensor device platform. The choice of nanomaterials, dimension of the sensor, and fabrication method influence the performance of the humidity sensor in a controlled environment. GO nanocomposites show significant improvement in response time (82.67 times greater at 40% RH) and sensitivity (95.7 times more at 60% RH). The response time of 4.5 s and recovery time of 21 s was significantly better for a wider range of relative humidity compared to the reduced GO-sensing layer and ZnMnO. An optimized 6 mm × 3 mm dimension sensor with a 28-fingers comb was fabricated with a metal-etching process. This is one of the most effective methods for bulk manufacturing. The performance of the sensing layer is comparable to established sensing nanomaterials that are currently used in humidity sensors, and hence can be extended for optimal bulk manufacturing with minimum electrochemical treatments.

An Improved Humidity Sensor with GO-Mn-Doped ZnO Nanocomposite and Dimensional Orchestration of Comb Electrode for Effective Bulk Manufacturing

Flexible Humidity Sensors with High Water-Resistance Based on a Composite of Sodium Carboxymethyl Cellulose, Graphene Oxide and 3-Glycidyloxypropyl Trimethoxysilane

Fabrication of Humidity Sensors Based on Laser Scribed Graphene Oxide/SnO2 Composite Layers

Stable and Fast-Response Capacitive Humidity Sensors Based on a ZnO Nanopowder/PVP-RGO Multilayer.

Highly proton conducting MoS2/graphene oxide nanocomposite based chemoresistive humidity sensor

A fast response and highly sensitive flexible humidity sensor based on a nanocomposite film of MoS2 and graphene oxide

Fast response and highly sensitive flexible humidity sensor based on nanocomposite film of MoS2 and graphene oxide

Elucidation of rGO Incorporation on Structural, Morphological and Optical Properties of rGO/ZnO Nanocomposites for Flexible Humidity Sensor Applications

Large-area, size-controlled and transferable graphene oxide-metal films for humidity sensor

Humidity Sensor With Graphene Oxide As Sensing Material

Facilely prepared composites of polyelectrolytes and graphene as the sensing materials for the detection of very low humidity

Ultra-Sensitive and Fast Humidity Sensors Based on Direct Laser-Scribed Graphene Oxide/Carbon Nanotubes Composites

Humidity Sensor Composed of Laser-Induced Graphene Electrode and Graphene Oxide for Monitoring Respiration and Skin Moisture

Printable and Flexible Humidity Sensor Based on Graphene -Oxide-Supported MoTe2 Nanosheets for Multifunctional Applications

Highly sensitive balloon-like fiber interferometer based on GO nanomaterial coated for humidity measurement

QCM-based Humidity Sensor and Sensing Properties Employing Colloidal SnO2 Nanowires

A Humidity Sensor Based on AlN Lamb Wave Resonator Coated with Graphene Oxide of Different Concentrations

Gr/3D–ZnO Nanocomposites as Humidity Sensors with Enhanced Sensing Response

High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

Graphene oxide/cellulose nanofiber-based capacitive humidity sensor with high sensitivity

Fast Response and High Sensitivity ZnO/glass Surface Acoustic Wave Humidity Sensors Using Graphene Oxide Sensing Layer