Abstract:In this work, TiO 2 thin films were deposited onto glass substrate by two different techniques: sol-gel dip-coating (SG) and reactive DC magnetron sputtering (Sput). The prepared samples have been characterized by means of micro-Raman, differential scanning calorimetry (DSC), thermogravimetric analysis (TGA) measurements, scanning electron microscopy (SEM), UV-Visible spectrophotometry, and M-Lines spectroscopy (MLS). The micro-Raman results showed an amorphous TiO 2 -SG phase and the vibrational mode of TiO 2 -Sput is anatase phase. DSC-TGA analysis was used to investigate the thermal properties of the TiO 2 material. SEM spectroscopy has shown that TiO 2 -SG has a disordered and more porous surface, TiO 2 -Sput sample is homogeneous and shows uniform distribution of densely packed well-defined grains. The obtained films have an optical transmittance varying from 60 to 88% in the visible region. The optical band gaps deduced from the transmittance are 3.48 and 3.53 eV for TiO 2 -SG and TiO 2 -Sput, respectively. The optical waveguiding measurements carried out on TiO 2 -SG and TiO 2 -Sput films show single guided modes behavior (TE 0 and TM 0 ). These measurements have allowed deducing the refractive index and thickness values that are 2.06 at 216 nm for TiO 2 -SG and 2.26 at 204 nm for TiO 2 -Sput thin films. The analysis of waveguiding properties indicates that amorphous TiO 2 may prove to be more efficient in photonic device as compared to crystalline TiO 2 . Keywords: TiO 2 , thin films, sol-gel, sputtering, anatase, waveguiding.

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