Abstract:The thermal conductivity of thin films and interface thermal conductance of dissimilar materials play a critical role in the functionality and the reliability of micro/nano- materials and devices. The transient thermoreflectance methods, including the time-domain thermoreflectance (TDTR) and the frequency-domain thermoreflectance (FDTR) techniques are excellent approaches for the challenging measurements of interface thermal conductance of dissimilar materials. A theoretical model is introduced to analyze the TDTR and FDTR signals in a tri-layer structure which consists of metal transducer, thin film, and substrate. Such a tri-layer structure represents typical sample geometry in the thermoreflectance measurements for the thermal conductivity and interface thermal conductance of thin films. The sensitivity of TDTR signals to the thermal conductivity of thin films is analyzed to show that the modulation frequency needs to be selected carefully for a high accuracy TDTR measurement. However, such a frequency selection is closely related to the unknown thermal properties and consequently hard to make before the measurement. Fortunately this limitation can be avoided in FDTR. Depending on the modulation frequency, the heat transport in such a tri-layer could be divided into three regimes based on the thickness of the film and the thermal penetration depth, the thermal conductivity of thin films and interface thermal conductance can be subsequently obtained by fitting different frequency regions of one FDTR measurement curve. FDTR measurements are then conducted along with the aforementioned analysis to obtain the thermal conductivity of SiO2 thin films and interface thermal conductance SiO2 and Si. FDTR measurement results agree well with the TDTR measurements, but promises to be a much easier implementation than TDTR measurements.

Thermal Diffusivities of Bilayer Films Deposited on Substrates Characterized Simultaneously by Transient Reflecting Grating Technique

Size-dependent Thermal Diffusivity of Multilayered Thin Films Deposited on Substrates Characterized by Transient Grating Technique

Transient Thermal Grating Measurements and FEM Calculations of Thermoelastic Theory for Characterizing Multilayered Thin Films

THERMAL PROPERTIES OF NANOSCALED MULTILAYER FILMS DEPOSITED ON SUBSTRATES CHARACTERIZED BY TRANSIENT GRATING TECHNIQUE

Thermal Diffusivity of Film/Substrate Structures Characterized by Transient Thermal Grating Method

Transient Thermal Grating Analyses of Film/substrate Structures by Eigenfunction Expansion Method

Ultrafast Thermoreflectance Techniques for Measuring Thermal Conductivity and Interface Thermal Conductance of Thin Films

Thermal Visualization of Buried Interfaces by Transient and Steady-State Responses of Time-Domain Thermoreflectance

Interface thermal conductance and the thermal conductivity of multilayer thin films

Simultaneous measurement of cross-plane thermal conductivity and interfacial thermal conductance of nano-metal films on a low thermal diffusivity substrate using TDTR

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Analytical model for laser-induced transient grating measurements of thermal diffusivity in non-opaque materials

Theoretical and Experimental Study of Photo-Modulated Reflectivity Detections for Transparent Film/opaque Substrate Structures

Analysis of Simplified Heat Transfer Models for Thermal Property Determination of Nano-Film by TDTR Method

Prediction and Measurement of Thermal Transport Across Interfaces Between Semiconductor and Adjacent Layers

Measurements of electron-phonon coupling factor and interfacial thermal resistance of metallic nano-films using a transient thermoreflectance technique

Anisotropic thermal diffusivity measurement of thin films: From a few to hundreds of microns

Measurement of Thermal Diffusivity of Thin Film in Thickness Direction Using an Ordinary Dielectric Film As the Sensor

Measurement of the Thermal Diffusivity of Solids by Transient Thermal Gratings Method

Thermal Conductivity and Interfacial Thermal Resistance in Bilayered Nanofilms by Nonequilibrium Molecular Dynamics Simulations

Thermal Model for Time-Domain Thermoreflectance Experiments in a Laser Flash Geometry