THERMAL PROPERTIES OF NANOSCALED MULTILAYER FILMS DEPOSITED ON SUBSTRATES CHARACTERIZED BY TRANSIENT GRATING TECHNIQUE

Heng-yi Ju,Shu-yi Zhang,Zhe Li,Di Ma,Xiu-ji Shui
DOI: https://doi.org/10.1063/1.3114086
2009-01-01
AIP Conference Proceedings
Abstract:The thermal diffusivities of bilayer thin films with thicknesses of tens and/or hundreds nm deposited on substrates are characterized by a transient grating method. Based on a transient grating experiment, a 2-dimensional thermoelastic model and eigenfunction expansion method are used to calculate the thermal fields in the multilayered structures. By fitting the theoretical calculations to the experimental data, the diffusivities of both deposited layered thin films can be evaluated simultaneously.
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