P‐65: Study on Resin As Passivation Layer of Retina Display for Mobile Phone Screen

Changjiang Yan,Zhenyu Xie,Jian Guo,Wei Wang,TaeYup Min,Shunkang Su,Kai Lu,Jiaxiang Zhang,Tiansheng Li,Shaoying Xu,Wenyu Zhang,Zongmin Tian,Jing Li,Liu Kun
DOI: https://doi.org/10.1002/j.2168-0159.2014.tb00319.x
2014-01-01
Abstract:AbstractThe Si‐C resin layer has lower dielectric constant, better optical transparency, and can be spin coated as a flat surface film easily. By using Si‐C resin as passivation layer, we investigated the etching characteristics of resin thin films in SF6/O2/He plasma, and found the variable thickness of channel protection layers have a play role in a‐Si:H TFT characteristic. We also success in prototyping a high definition LCD panel, retina display as 326 pixels per inch, which can be improved the RC delay of signal effectively and decreased nearly 40% in the logic power consumption compare to the existing panel with only SiNx passivation layer.
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