Abstract:MgB2 has a large coherence length, and it is relatively easy to prepare Josephson junction-based electronic devices with simple processes and good repeatability. Therefore, it is more advantageous to use MgB2 thin films to prepare Josephson junctions. Based on the above background, the research content of this paper is the electron microscope research of the high critical temperature superconducting material MgB2 Josephson junction. This paper proposes the metal chemical vapor deposition method to prepare MgB2 superconducting thin film. This method uses diborane as the B source, and organic magnesium MgCP2 gas as the magnesium source. In the original traditional chemical vapor deposition system, a gas channel for introducing the organic magnesium source is added, so that the organic magnesium gas is thermally decomposed into Mg atoms and some functional groups. Then it reacts with B to form MgB2 film, which has better superconducting properties. Finally, through experimental simulations, the results prove that when the deposition temperature is higher, the obtained B precursor film tends to change from amorphous B film to crystalline B film. After energy spectrum testing, it is found that the surface of the film has only two components of boron and oxygen, and The ratio of boron atoms to oxygen atoms is about 88.72: 11.28. The MgB2-B-MgB2 Josephson junction was successfully prepared using the crystalline form B film, which proved that the crystalline form B is reasonable and feasible as the dielectric layer of the Josephson junction.

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