Abstract:With the rapid development in advanced industries, such as microelectronics and optics sectors, the functional feature size of devises/components has been decreasing from micro to nanometric, and even atomic and close-to-atomic scale (ACS) for higher performance, smaller volume and lower energy consumption. By this time, a great many quantum structures are proposed, with not only an extreme scale of several or even single atom, but also a nearly ideal lattice structure with no material defect. It is almost no doubt that such structures play critical role in the next generation products, which shows an urgent demand for the atomic and close-to-atomic scale manufacturing (ACSM). Laser machining is one of the most important approaches widely used in engineering and scientific research. It is high-efficient and applicable for most kinds of materials. Moreover, the processing scale covers a huge range from millimeters to nanometers, and has already touches the atomic level. Laser-material interaction mechanism, as the foundation of laser machining, determines the machining accuracy and surface quality. It becomes much more sophisticated and dominant with a decrease in processing scale, which is systematically reviewed in this article. In general, the mechanisms of laser-induced material removal are classified into ablation, Coulomb explosion and atomic desorption, with a decrease in the scale from above microns to angstroms. The effects of processing parameters on both fundamental material response and machined surface quality are discussed, as well as theoretical methods to simulate and understand the underlying mechanisms. Examples at nanometric to atomic scale are provided, which demonstrate the capability of laser machining in achieving the ultimate precision and becoming a promising approach to ACSM.

Material removal with constant depth in CNC laser milling based on adaptive control of laser fluence

Transient Ablation Model for Laser Machining Polymer Microfluidic Chip

Milling Error Prediction of Thin-Walled Parts During High-Speed Machining

Simulation of High-Speed Milling Process of Aerospace Aluminum Alloy

Design of a hybrid adaptive fuzzy and neural network controller for nonlinear laser alloying process.

Depth Model and 5-Axis Variable-Angle Laser Engraving Experiment Based on the Energy Conservation Principle

A Compound Feedrate Control Method For Multi-Axis Cnc Machining

Cutting Deflection Control of the Blade Based on Real-Time Feedrate Scheduling in Open Modular Architecture CNC System

Study on material removal mechanism and control strategy of multi-axis fast ED-milling

System Design For Laser Assisted Milling Of Complex Parts

FEM Numerical Model and Feedrate Optimization Based On-line Deflection Control of Thin-walled Parts in Flank Milling

A New Approach of Modelling Bottom Edge Cutting in 4-Axis Rough Milling of Complex Parts and Its Application on Feed Rate Optimization

Multi-constrained Adaptive Feedrate Control for 5-Axis Machining

Cutting Deflection Control of Thin-Walled Part Based on Real-Time Force Signal Detection and Processing

Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy.

Analytical modeling of workpiece temperature in laser-assisted milling considering the combined effect of multi-heat sources

Analysis and Design of Cooperative Control Solutions for Electrical Systems of Laser CNC Machines

Study on the control and mechanism of balance between heat and cold for spray-mist-assisted laser processing of CFRP

Analytical modeling of cutting forces considering material softening effect in laser-assisted milling of AerMet100 steel

Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales

Numerical Simulation and Experimental Research on Reduction of Taper and HAZ During Laser Drilling Using Moving Focal Point