Interfacial composition and adhesion of sputtered-Y 2 O 3 film on ZnS substrate

pei lei,bing dai,jiaqi zhu,gui tian,xiaoting chen,yongshuai wang,y zhu,gang liu,lei yang,jiecai han
DOI: https://doi.org/10.1016/j.apsusc.2015.05.109
IF: 6.7
2015-01-01
Applied Surface Science
Abstract:•Sputtered-Y2O3/ZnS interface has been optimized by substrate heating and biasing.•Nanoscale transition zones have been observed.•Phenomenon of composition distribution at interface has been explored.•Interfacial strength has been improved by decreasing the physisorbed oxygen.
What problem does this paper attempt to address?